Enhanced Blue-Orange-Red Light Emission From Nc-Si:H/Sio2 Pillar Arrays Using Nanosphere Lithography
Z. Y. Ma,G. Y. Liu,M. Y. Yan,G. Y. Xia,X. F. Jiang,T. Ling,H. C. Sun,D. Q. Wang,H. P. Dong,L. Xu,W. Li,K. J. Chen,J. Xu,D. Feng
DOI: https://doi.org/10.1002/pssc.200982814
2010-01-01
Abstract:Hydrogen passivated nanocrystalline Si/SiO2 (nc-Si:H/SiO2) pillar arrays were fabricated by using nanosphere lithography combination with hydrogen plasma annealing (HPA). Enhanced blue-orange-red photoluminescence (PL) could be observed by the naked eye in the bright room from the samples. By controlling the size of nc-Si: H from 3.8 to 1.8 nm, the PL peak blueshifts from 757 to 435 nm. It is found that the nanopillar structure can drastically enhance the light-absorbing properties of the samples and hydrogenation of nc-Si embedded in pillars is benefit to the increase of photoluminescence (PL) intensity. Combined with the analysis of atomic force microscope (AFM), transmission electron microscopy (TEM), Fourier Transform Infrared (FTIR) spectroscopy and absorption spectra, the blue photoluminescence (PL) peak are ascribed to the quantum size effect of the nc-Si passivated by hydrogen, and the orange and red ones to both the localized surface states and quantum confinement effects of nc-Si:H. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim