PECVD SiO2/Si3N4 DOUBLE LAYERS ELECTRETS FOR APPLICATION IN MEMS POWER GENERATOR

Jinwen Zhang,Zhiyu Chen,Y. Hao,Zhongquan Wen,Yufeng Jin,Z. Wen
2009-01-01
Abstract:This paper reports SiO2/Si3N4 double layers electrets both prepared by PECVD on glass substrates. Their charge stability and isothermal charge decay were studied. Effects of Si3N4 thickness on the performance of double layers electret were investigated. Different methods of treatment were employed to improve charge stability under high humidity conditions. The experimental results show that PECVD prepared SiO2/Si3N4 double layers exhibit high performance under different environmental conditions. At last, an MEMS power generator structure with 10 m PECVD SiO2/Si3N4 double layers as electret was successfully fabricated by a bulk micromachining process.
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