SEM Research of SiO2 Thin Film on Inner Wall of Glass Container by PECVD

Heng-wei ZHU,Wen-jie LI,Jin-yun ZHANG,Huan YE,Guo-an CHEN,Bin LU,Jian-guo LU
DOI: https://doi.org/10.14136/j.cnki.issn 1673-2812.2015.05.009
2015-01-01
Abstract:SiO2thin films were deposited on inner wall of a glass container as the barrier coating,using a plasma-enhanced chemical vapor deposition(PECVD)method independently developed by ourselves.The deposition was conducted at various technical parameters including gas flow rate ratio,reactive gas pressure,and deposition time.The surface morphology and microstructure of the films were observed under scanning electron microscopy(SEM).Effects of the deposition parameters on the film performances were analyzed based on the observation results.Optimized process conditions were determined,and high-quality SiO2 thin films were deposited on the inner wall of glass containers.
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