Structural Investigation And Barrier Properties Of A-C : H Thin Films On Polymer By Pecvd

Yuefei Zhang,Xinchao Bian,Qlang Chen,Yu Wang,Guangqiu Zhang,Yuanjing Ge
DOI: https://doi.org/10.1117/12.792285
2008-01-01
Abstract:In this paper, a thin amorphous hydrogenated carbon films were deposited on polyethylene tereplithalate (PET) by means of capacitive coupled RF plasma-enhanced chemical vapor deposition (PECVD) using a mixture of CH4 with Ar gas as a source. The chemical composition of the deposited films were analyzed by fourier transform infrared (FTIR) spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), laser Roman spectroscopy(LRS). And the microgram of the film was detected atomic force microscopy (AIM). The barrier properties were examined by water vapour permeation. The results show that the barrier performance of water vapor permeation in PET coated by hydrogenated carbon film was decreased from 86.16 (g/m(2) d) to 10.68 (g/m(2)d) in experiments.
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