Monomers effect on the gas and humid barrier properties in PECVD deposited SiOx film on PET surface

Qiang Chen,Meili Zhou,Yabo Fu,Yuefei Zhang,Yuanjing Ge
2006-01-01
Abstract:Monomers effect on the gas and water barrier permeation properies is explored recently. The tetraethoxysilane (TEOS, Si(OC2H5)4) vapor, hexamethyldisiloxane (HMDSO, Si(OC2H5)6) vapor as a monomer is inlet into the reaction chamber and then deposits SiOx film on polyethylene terephthalate (PET) surface. By Fourier transform infrared (FTIR) spectroscopy the coating structure is identified and as a dominant the gas and humid permeation properties are also characterized. The investigation of correlation between chemical component and the barrier property is attempted by Atomic Force Microscopy (AFM) in this paper.
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