Deposition of high reflectance Si-based multi-layered coatings on curved glass substrates

Fangyuan Liu,Jian Wang,Yong Zhao,Qiang Hu

DOI: https://doi.org/10.3969/j.issn.1672-7126.2013.04.13

2013-01-01

Abstract:The reflective interference multilayered coatings, with metal-induced poly-silicon and silica as the high and low refractive index materials, respectively, were deposited by magnetron sputtering on glass substrates with flat and/or curved surfaces to improve the light extraction of a plasma display panel (PDP). The average reflectance in the visible light range of the coating on flat substrate was measured to be 80%. The barrier rib in a PDP was experimentally simulated with a semi-cylindrical segment of a tube, and the deposition and spatial thickness distribution of the multilayered coating was calculated in Monte Carlo simulation. The simulated results show that the sputtering at an optimized pressure resulted in the multi-layers with uniform thickness. The reflectance of the multi-layers on the curved substrate was measured. The preliminary results show that deposited at 0.7 Pa, the reflectance of the coating ranges from 50% to 65%.