Broadband Absorption Coating for Large-Curvature Surfaces by Atomic Layer Deposition

Tingting Zheng,Chenying Yang,Yueguang Zhang,Hailan Wang,Xiao Chen,Yaguo Li,Qiao Xu,Weidong Shen

DOI: https://doi.org/10.1364/ao.423964

IF: 1.9

2021-01-01

Applied Optics

Abstract:For many applications, large curvature surfaces or complicated 3D structures are required to absorb light that falls on them to reduce stray light or energy collection. A novel, to the best of our knowledge, strategy with a metal–dielectric film stack by the atomic layer deposition technique is put forward to achieve broadband absorption coating covering both sides of a quartz tube completely. Absorptive metallic material of titanium–aluminum–carbon composite and dielectric material of aluminum oxide ( A l 2 O 3 ) is employed to realize high absorption ( > 99 % ) for the 400–780 nm band with the configuration of a six-layer metal–dielectric film stack. Good angle insensitivity up to 50° for P - and S -polarizations is demonstrated experimentally with the proposed structure on a glass slab. The average absorption of the coated quartz tube reaches as high as 99% for all curving areas on the inner and outer sides, while the nonuniformity is confined to 1.5% for the axial and circumferential directions. This presented approach has enormous potential in the fields of optical detection, optical imaging, optical sensing, and energy management.