Broadband Absorption Coating for Large- Curvature Surfaces by Atomic Layer Deposition

Tingting Zheng,Weidong Shen,Chenying Yang,Yueguang Zhang,Hailan Wang

DOI: https://doi.org/10.1364/oic.2022.tc.6

2022-01-01

Abstract:ALD technique is put forward to achieve the broadband absorption coating covering large-curvature surfaces, which can achieve a high absorption (>99%) from 400 to 780nm, with good angular tolerance and uniformity.

What problem does this paper attempt to address?

Broadband Absorption Coating for Large-Curvature Surfaces by Atomic Layer Deposition

Tingting Zheng,Chenying Yang,Yueguang Zhang,Hailan Wang,Xiao Chen,Yaguo Li,Qiao Xu,Weidong Shen

DOI: https://doi.org/10.1364/ao.423964

IF: 1.9

2021-01-01

Applied Optics

Abstract:For many applications, large curvature surfaces or complicated 3D structures are required to absorb light that falls on them to reduce stray light or energy collection. A novel, to the best of our knowledge, strategy with a metal–dielectric film stack by the atomic layer deposition technique is put forward to achieve broadband absorption coating covering both sides of a quartz tube completely. Absorptive metallic material of titanium–aluminum–carbon composite and dielectric material of aluminum oxide ( A l 2 O 3 ) is employed to realize high absorption ( > 99 % ) for the 400–780 nm band with the configuration of a six-layer metal–dielectric film stack. Good angle insensitivity up to 50° for P - and S -polarizations is demonstrated experimentally with the proposed structure on a glass slab. The average absorption of the coated quartz tube reaches as high as 99% for all curving areas on the inner and outer sides, while the nonuniformity is confined to 1.5% for the axial and circumferential directions. This presented approach has enormous potential in the fields of optical detection, optical imaging, optical sensing, and energy management.
Precise broad-band anti-refection coating fabricated by atomic layer deposition

Yanghui Li,Weidong Shen,Yueguang Zhang,Xiang Hao,Huanhuan Fan,Xü Liu

DOI: https://doi.org/10.1016/j.optcom.2012.11.071

IF: 2.4

2013-01-01

Optics Communications

Abstract:By demarcating the ranges of transition regions on different underlayers in atomic layer deposition (ALD), their effects on broad-band anti-refection (BBAR) coating (400–680nm) are evaluated. In ALD, comparatively larger transition region of TiO2 on bare BK7 glass severely limits the fabricated precision of BBAR coating with a thin first layer. Considering that the transition region on existent ALD material is much thinner than that on bare substrate, a thick Al2O3 film is inserted as a pre-deposited layer on the substrate to completely overlay the transition region on bare BK7.A good agreement between the designed and experimental curves is obtained, and its average reflectance is 0.535% (400–680nm) in practice.
Atomic Layer Deposition of Al2O3 and TiO2 Multilayers for Application As Broadband Antireflection Coating

Yanghui Li,weidong shen,Yueguang Zhang,Xu Liu

DOI: https://doi.org/10.1364/oic.2013.wc.5

2013-01-01

Abstract:A thick Al2O3 film is inserted as a pre-deposited layer to overlay the transition region on bare BK7 in atomic layer deposition. The average reflectance is 0.535% (400~680nm) in practice, compared with the designed 0.408%.
Wide-angle Broadband Antireflection Coatings with Nano-Taper Hydrated Alumina Film.

Hailan Wang,Chenying Yang,Yusi Wang,Wenjia Yuan,Tingting Zheng,Xiao Chen,Yujie Liu,Yueguang Zhang,Weidong Shen

DOI: https://doi.org/10.1364/oe.464327

IF: 3.8

2022-01-01

Optics Express

Abstract:Wide-angle and broadband antireflection (AR) coating is of the essence in modern optical systems in many fields, which has a great influence on the stray light and imaging quality. A simple and convenient manufacturing method is proposed to address this issue based on a composite coating combining the nano-tapered Al2O3•xH2O (AH) structure and high-low index thin film stack. The optical properties of nano-tapered AH structure at various thickness are first studied and modeled in optics by several homogeneous sub-layers with the graded equivalent index. The designed composite AR coatings are manufactured by vacuum deposition and wet etching subsequently in the hot deionized water. Compared to the common dielectric multilayer antireflection stack, the composite coating presents excellent AR performance. The measured average reflectance values of the double-side coated BK7 glass are as low as 0.40%, 0.41%, 0.56% and 3.13% in 400-1100nm band at angles of incidence (AOI) of 6°, 20°, 40°, and 60°, respectively, while the measured average transmittance at normal incidence increases up to 99.3%. Finally, the process reproductivity, environmental reliability test including long term storage, high temperature annealing and 85°C-85% relative humidity storage of the composite coatings are evaluated. The proposed AR scheme provides a low-cost, efficient, wide-angle and broadband AR coating for kinds of large-curvature components and complex surfaces in fields of consumer electronics, automotive, security, etc.
Wide-angle Broadband Antireflection with Nano-taper Hydrated Alumina Film

Hailan Wang,Weidong Shen,Chenying Yang,Yueguang Zhang,Tingting Zheng

DOI: https://doi.org/10.1364/oic.2022.md.10

2022-01-01

Abstract:Wide-angle and broadband antireflection coating is proposed including the nano-tapered Al2O3•xH2O structure and high-low index multilayer film. The average reflectance values for 400-1100nm are 0.40% and 3.13% at AOI of 6° and 60°.
A novel trilayer antireflection coating using dip-coating technique

jian xu,yi yin,haiming ma,hui ye,xu liu

DOI: https://doi.org/10.3788/COL201109.073101

IF: 2.56

2011-01-01

Chinese Optics Letters

Abstract:We report a new structure for broadband antireflection coating by dip-coating technique, which has minimal cost and is compatible with large-scale manufacturing. The coatings are prepared by depositing SiO2 sol-gel film on a glass substrate, subsequently depositing SiO2 single-layer particle coating through electrostatic attraction, and depositing a final very thin SiO2 sol-gel film to improve the mechanical strength of the whole coating structure. The refractive index of the structure changes gradually from the top to the substrate. The transmittance of a glass substrate has been experimentally found to be improved in the spectral range of 400-1 400 nm and in the incidence angle range from 0 degrees to at least 45 degrees. The mechanical strength is immensely improved because of the additional thin SiO2 sol-gel layer. The surface texture can be applied to the substrates of different materials and shapes as an add-on coating.
Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition

Mu Wen,Shen Weidong,Yang Chenying,Zheng Xiaowen,Wang Zhen,Yuan Huaxin,Yuan Wenjia,Zhang Yueguang

DOI: https://doi.org/10.3788/aos201939.0324001

2019-01-01

Abstract:The uniformity distributions of the anti-reflection (AR) coatings prepared on the quartz tube surfaces by the atomic layer deposition (ALD) technique as well as the influences of the inner diameter, outer diameter, and quartz tube length on the uniformity distributions of the deposited coatings arc studied. With the single-wavelength AR coatings as the research object, the reflectivity spectrum from the experimental test matches well with the simulated result. The minimum reflectivity on the quartz tube surface is decreased to 0. 17%. If the effect of the sample holder is ignored, the non -uniformity of the AR coatings for the outer and the inner surfaces of the quartz tubes is roughly identical, which is within the range of ++/- 1.69%. The thicknesses and the central wavelengths of the AR coatings for the inner and outer surfaces arc almost identical. Moreover, the variation of the quartz tube size has no obvious effect on the coating uniformity of the outer and inner surfaces. Therefore, the AR coatings with small thickness deviations and similar uniformity distributions can be deposited on the outer and inner surfaces of large curvature elements by the ALD technology.
Anti-reflection Coating at 550 Nm Fabricated by Atomic Layer Deposition

Yanghui Li,Weidong Shen,Yueguang Zhang,Xiang Hao,Huanhuan Fan,Xu Liu

DOI: https://doi.org/10.3788/col201311.s10205

IF: 2.56

2013-01-01

Chinese Optics Letters

Abstract:Trimethylamine (TMA), TiCl4, and water are applied as the precursors to deposit Al2O3 and TiO2. With different substrate temperatures, the optical properties and surface morphologies of the two oxides TiO2 and SiO2 are studied, respectively. With substrate temperature of 120 oC, amorphous TiO2 can be obtained, and the surface roughness (RMS) is only 0.928 nm. Applying Al2O3 and TiO2 deposited in 120 oC as low and high refractive index materials, anti-reflection (AR) coating at single point (550 nm) is designed. Furthermore, with the calibrated growth rates, this AR coating is fabricated, and its ultimate reflectance for the AR coating at 550 nm is less than 0.2%, which can meet the requirement for most applications.
Atomic Layer Deposition and Its Applications in Optical Thin Films

Junpeng He,ZhangYueguang,Weidong Shen,Xu Liu,Peifu Cu

DOI: https://doi.org/10.13922/j.cnki.cjovst.2009.02.005

2009-01-01

Abstract:The latest progress of atomic layer deposition (ALD) technology for optical coating was tentatively reviewed. First, the film growth conditions, including deposition rate, pressure and substrate temperature were compared with those of the conventional techniques. Besides, the advantages of the ALD technique, including good uniformity and high stability of the film, and easy control of the film thickness were introduced. Next, the influence of the precursors, especially for oxide films, on microstructures and optical properties was discussed. Finally, the strengths and weaknesses of the filters made of ALD films, including antireflection coating(AR), variable refractive index films, laser resistant coatings and ultraviolet (UV) blocking filters were discussed.
Large-Area, Omnidirectional Metasurface Exhibiting Unpolarized Broadband Absorption

Qiansen Xie,Huajun Feng,Shangliang Wu,Weidong Shen,Xu Liu,Zhihai Xu

DOI: https://doi.org/10.1016/j.optcom.2023.129269

IF: 2.4

2023-01-01

Optics Communications

Abstract:Despite the ongoing efforts to design and fabricate large-area metasurface absorbers using cost-effective fabrication processes and low-cost materials, significant challenges persist. In this study, we present an anodized aluminum oxide template-assisted metasurface absorber with an area of 4 cm2, which incorporates glue cylinder arrays, a low-cost nickel layer, and protective glue layers. This device achieved an average absorptivity of approximately 91% (90% in the experiment) in the 200-900 nm wavelength range. The absorption level remained above 80% even at incident angles up to 45 degrees, with calculated and experimental values of 92% and 82%, respectively. Moreover, the absorption is not sensitive to the thickness of the residual glue layers, making it ideal for roll-to-roll nanoimprinting processes. Therefore, the proposed metasurface absorber offers an alternative method for achieving broadband absorption in an effective manner and has great potential for related applications.
Broadband Light Absorber Based on Porous Alumina Structure Covered with Ultrathin Iridium Film

Bo Fang,Chenying Yang,Chenlei Pang,Weidong Shen,Xing Zhang,Yueguang Zhang,Wenjia Yuan,Xu Liu

DOI: https://doi.org/10.1063/1.4979581

IF: 4

2017-01-01

Applied Physics Letters

Abstract:In this letter, we propose a broadband absorber with high efficiency by an atomic layer depositing nanometer iridium (Ir) film onto a porous anodic alumina (PAA) template. The average absorption is able to achieve as high as 93.4% from 400 to 1100 nm and the absorption efficiency can reach up to 96.8% for the improved structure of the quadrangular frustum pyramid array. Not only the hexagonal latticed structures of the PAA template but also many similar structures based on gratings or holes with the square latticed or other latticed mode can realize the broadband high absorption efficiency. The light absorbed within the Ir/Glass interface and the sidewalls of PAA by the light funneling effect both contribute to the broadband absorption with high efficiency. This absorber, described in this paper, can be manufactured with a low-cost and large-area manner and has potential applications in fields of light harvesting, imaging, etc.
Atmospheric-Window-Matching Hierarchical Broadband Infrared Absorber Realized by Lithography-Free Fabrication

Dezhao Li,Yang Li,Yu Su,Cheng Chi,Baoling Huang

DOI: https://doi.org/10.3389/fenrg.2018.00020

IF: 3.4

2018-01-01

Frontiers in Energy Research

Abstract:An ultra-broadband selective absorber has been realized with a hierarchical structure through integrating vacuum impedance matched structure, quarter wavelength structure and gradient refractive index structure. Through optimizing the design parameters of the proposed hierarchical structure, an ultra-broadband infrared absorber covering three major atmospheric windows (0.7~2.5 μm, 3~5 μm and 8~14 μm) has been numerically and experimentally demonstrated. An overall absorption up to 80% covering all the three major atmospheric infrared windows and a ratio of the total absorptions within and beyond the windows as high as 5.88, has been achieved with the developed absorber. The high absorption and spectral selectivity of the absorber make it promising for sensitive broadband infrared spectroscopy detection. The proposed hierarchical structure also provides great design freedom with many tunable factors, making it convenient to extend the design for other applications. In addition, we developed a cost-effective lithography-free method for the fabrication of this structure. The design flexibility and fabrication convenience of this hierarchical structure render it suitable for the development of tailored selective broadband absorbers for targeted applications.
Ultrabroadband and Omnidirectional Absorbers Based on a Tandem Multilayer Structure

Chenying Yang,Chengang Ji,Weidong Shen,Kyu-Tae Lee,Yueguang Zhang,Xu Liu,L. Jay Guo

DOI: https://doi.org/10.1364/oic.2016.md.4

2016-01-01

Abstract:We propose a novel scheme for ultrabroadband and omnidirectional absorbers featuring a tandem structure of various absorptive materials and graded index profile. They show an average absorption of 98% over 400-2000nm and >93% for 400-3500nm range.
Compact Multilayer Film Structures for Ultrabroadband, Omnidirectional, and Efficient Absorption

Chenying Yang,Chengang Ji,Weidong Shen,Kyu-Tae Lee,Yueguang Zhang,Xu Liu,L. Jay Guo

DOI: https://doi.org/10.1021/acsphotonics.5b00689

IF: 7

2016-01-01

ACS Photonics

Abstract:We present a novel scheme for ultrabroadband and omnidirectional perfect absorbers with compact multilayer film structure. Our proposed device shows an average absorption of similar to 98% over a wide range of wavelengths ranging from 400 to 2000 nm. The ultrabroadband characteristics are achieved with strongly overlapped optical resonances by designing a tandem structure composed of three absorptive materials, while the overall structure features a graded refractive index profile to obtain a wideband antireflection property. In addition to the high efficiency and ultrabroadband absorption, our perfect absorbers exhibit a great angular tolerance up to 60 degrees, which is attributed to not only relatively broad resonances but also negligible propagation phase shifts in ultrathin highly absorbing layers. Lastly, we explore the effect of the number of semiconductor-metal stacks on the performance of the absorber. The presented approach can have tremendous potential for various applications, such as solar-thermal energy harvesting, thermoelectrics, detection, and imaging.
Pattened Absorbers in Visible to NIR Region

Zhen Wang,Weidong Shen,Chenying Yang,Yueguang Zhang

DOI: https://doi.org/10.1364/oic.2019.ta.11

2019-01-01

Abstract:We propose a novel absorbers structure, based on Cr/Cr2O3 film stack which presents high absorption up to ~99% for 400-1200nm band. An etching method preventing corrosion of the glass substrate is also proposed.
Double-sided Optical Coating of Strongly Curved Glass by Atomic Layer Deposition.

Ling-Shan Gao,Qing-Yuan Cai,Er-Tao Hu,Jing Zhou,Yao-Peng Li,Hai-Han Luo,Bao-Jian Liu,Yu-Xiang Zheng,Ding-Quan Liu

DOI: https://doi.org/10.1364/oe.423085

IF: 3.8

2021-01-01

Optics Express

Abstract:A reaction chamber of atomic layer deposition (ALD) was developed for simultaneous coating on the inner and outer surfaces of a large-size and strongly curved glass bowl. The inner surface ALD process was in a showerhead reaction mode and the outer surface ALD process was in a cross-flow reaction mode. Blue reflection (BR) film of 400 nm wavelength and broadband antireflection (BBAR) film of 400-700 nm wavelength were coated on different glass bowls by ALD. The spectral uniformity of both coated bowls was studied. The measured spectra at multiple positions of the glass bowl with the BBAR coating show better spectral uniformity along the circumference than the depth. The spectral deviation is mainly caused by the non-uniformity of the film on the outer surface (<±3%), and the film on the inner surface has good uniformity along both the circumference and the depth (<±0.7%). The growth rate of the outer film was reduced by 10% on average compared to that of the inner film due to the different gas flow mode.
Ultra-broad Band Absorber Made by Tungsten and Aluminium

Wei Wang,Ding Zhao,Qiang Li,Min Qiu

DOI: https://doi.org/10.1088/1742-6596/680/1/012039

2016-01-01

Journal of Physics Conference Series

Abstract:A broadband absorber comprising tungsten cubic arrays, a alumina layer and a tungsten film, is numerically and experimentally investigated, which exhibits near-unity absorption of visible and near-infrared light from 400 nm to 1150 nm. Benefiting from high melting points of tungsten and alumina, this device has great application potential in solar cells and thermal emission.
Visible-infrared (0.4–20 Μ M) Ultra-Broadband Absorber Based on Cascade Film Stacks

Chenying Yang,Tingting Zheng,Hao Luo,Kan Li,Yueguang Zhang,Meiping Zhu,Jianda Shao,Weidong Shen

DOI: https://doi.org/10.1063/5.0042818

IF: 4

2021-01-01

Applied Physics Letters

Abstract:In this paper, we present a glass-based double-side cascade film stack structure for visible-infrared ultrabroadband absorption. The proposed structure demonstrates an average absorption as high as ∼95% over an ultrawide range of wavelengths from 0.4 μm to 20 μm. The high absorption feature of the different bandgap materials is applied in this absorption device to realize the ultrabroadband absorption, combining with the metal-dielectric-like configuration for those unmatched-admittance wavelengths and the graded index profile arrangement for the 0.4–2.5 μm band. The proposed ultrabroadband absorber shows a great angular tolerance up to 60° with the average absorption of 90% remaining. The proposed approach can have tremendous potential in fields of optical sensing, camouflage, optical imaging, passive cooling, and sustainable power generation, profiting from the good mechanical characteristics of this compact multilayer film structure and the low manufacture costs with the simple physical vapor deposition.
Broadband plasma spray anti-reflection coating technology for millimeter-wave astrophysics

Oliver Jeong,Richard Plambeck,Christopher Raum,Aritoki Suzuki,Adrian T. Lee

DOI: https://doi.org/10.1364/AO.478048

2023-03-21

Abstract:We present a broadband plasma spray anti-reflection (AR) coating technology for millimeter-wave astrophysics experiments with large-format, cryogenic optics. By plasma spraying alumina- and silica-based powders, we have produced coatings of tunable index of refraction and thickness, low loss, and coefficient of thermal expansion matched to alumina substrates. We demonstrate two-layer AR coatings on alumina with reflection below 5% over 82% and 69% fractional bandwidths for 90/150 and 220/280 GHz passband designs, respectively, and band-averaged absorption loss reduced to ~1% at 100 K for both AR coatings. We describe the design, tolerance, fabrication process, and optical measurements of these AR coatings.

Instrumentation and Methods for Astrophysics
Near-Infrared Broadband Absorber with Film-Coupled Multilayer Nanorods

Xingxing Chen,Hanmo Gong,Shuowei Dai,Ding Zhao,Yuanqing Yang,Qiang Li,Min Qiu

DOI: https://doi.org/10.1364/ol.38.002247

2013-01-01

Abstract:Turning the surfaces of noble metals (metasurfaces) into black (highly absorptive) surfaces can be potentially applied in thermophotovoltaics, sensing, tailoring thermal emissivity, etc. Here we demonstrate an extremely broadband absorber for the 900-1600 nm wavelength range with robust high absorption efficiency. The inexpensive droplet evaporation method is implemented to create patterns of nanoparticles dispersed on a gold film spaced by a thin dielectric layer. The diversity of the complicated random stacking of the chemically synthesized gold nanorods is the major factor for the broad absorption band. Such a metamaterial absorber may pave the way for cost-effective manufacture of large-area black metasurfaces.

Broadband Absorption Coating for Large- Curvature Surfaces by Atomic Layer Deposition

Broadband Absorption Coating for Large-Curvature Surfaces by Atomic Layer Deposition

Precise broad-band anti-refection coating fabricated by atomic layer deposition

Atomic Layer Deposition of Al2O3 and TiO2 Multilayers for Application As Broadband Antireflection Coating

Wide-angle Broadband Antireflection Coatings with Nano-Taper Hydrated Alumina Film.

Wide-angle Broadband Antireflection with Nano-taper Hydrated Alumina Film

A novel trilayer antireflection coating using dip-coating technique

Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition

Anti-reflection Coating at 550 Nm Fabricated by Atomic Layer Deposition

Atomic Layer Deposition and Its Applications in Optical Thin Films

Large-Area, Omnidirectional Metasurface Exhibiting Unpolarized Broadband Absorption

Broadband Light Absorber Based on Porous Alumina Structure Covered with Ultrathin Iridium Film

Atmospheric-Window-Matching Hierarchical Broadband Infrared Absorber Realized by Lithography-Free Fabrication

Ultrabroadband and Omnidirectional Absorbers Based on a Tandem Multilayer Structure

Compact Multilayer Film Structures for Ultrabroadband, Omnidirectional, and Efficient Absorption

Pattened Absorbers in Visible to NIR Region

Double-sided Optical Coating of Strongly Curved Glass by Atomic Layer Deposition.

Ultra-broad Band Absorber Made by Tungsten and Aluminium

Visible-infrared (0.4–20 Μ M) Ultra-Broadband Absorber Based on Cascade Film Stacks

Broadband plasma spray anti-reflection coating technology for millimeter-wave astrophysics

Near-Infrared Broadband Absorber with Film-Coupled Multilayer Nanorods