Atomic Layer Deposition of Al2O3 and TiO2 Multilayers for Application As Broadband Antireflection Coating

Yanghui Li,weidong shen,Yueguang Zhang,Xu Liu

DOI: https://doi.org/10.1364/oic.2013.wc.5

2013-01-01

Abstract:A thick Al2O3 film is inserted as a pre-deposited layer to overlay the transition region on bare BK7 in atomic layer deposition. The average reflectance is 0.535% (400~680nm) in practice, compared with the designed 0.408%.

What problem does this paper attempt to address?

Precise broad-band anti-refection coating fabricated by atomic layer deposition

Yanghui Li,Weidong Shen,Yueguang Zhang,Xiang Hao,Huanhuan Fan,Xü Liu

DOI: https://doi.org/10.1016/j.optcom.2012.11.071

IF: 2.4

2013-01-01

Optics Communications

Abstract:By demarcating the ranges of transition regions on different underlayers in atomic layer deposition (ALD), their effects on broad-band anti-refection (BBAR) coating (400–680nm) are evaluated. In ALD, comparatively larger transition region of TiO2 on bare BK7 glass severely limits the fabricated precision of BBAR coating with a thin first layer. Considering that the transition region on existent ALD material is much thinner than that on bare substrate, a thick Al2O3 film is inserted as a pre-deposited layer on the substrate to completely overlay the transition region on bare BK7.A good agreement between the designed and experimental curves is obtained, and its average reflectance is 0.535% (400–680nm) in practice.
Anti-reflection Coating at 550 Nm Fabricated by Atomic Layer Deposition

Yanghui Li,Weidong Shen,Yueguang Zhang,Xiang Hao,Huanhuan Fan,Xu Liu

DOI: https://doi.org/10.3788/col201311.s10205

IF: 2.56

2013-01-01

Chinese Optics Letters

Abstract:Trimethylamine (TMA), TiCl4, and water are applied as the precursors to deposit Al2O3 and TiO2. With different substrate temperatures, the optical properties and surface morphologies of the two oxides TiO2 and SiO2 are studied, respectively. With substrate temperature of 120 oC, amorphous TiO2 can be obtained, and the surface roughness (RMS) is only 0.928 nm. Applying Al2O3 and TiO2 deposited in 120 oC as low and high refractive index materials, anti-reflection (AR) coating at single point (550 nm) is designed. Furthermore, with the calibrated growth rates, this AR coating is fabricated, and its ultimate reflectance for the AR coating at 550 nm is less than 0.2%, which can meet the requirement for most applications.
Wide-angle Broadband Antireflection with Nano-taper Hydrated Alumina Film

Hailan Wang,Weidong Shen,Chenying Yang,Yueguang Zhang,Tingting Zheng

DOI: https://doi.org/10.1364/oic.2022.md.10

2022-01-01

Abstract:Wide-angle and broadband antireflection coating is proposed including the nano-tapered Al2O3•xH2O structure and high-low index multilayer film. The average reflectance values for 400-1100nm are 0.40% and 3.13% at AOI of 6° and 60°.
Broadband Absorption Coating for Large- Curvature Surfaces by Atomic Layer Deposition

Tingting Zheng,Weidong Shen,Chenying Yang,Yueguang Zhang,Hailan Wang

DOI: https://doi.org/10.1364/oic.2022.tc.6

2022-01-01

Abstract:ALD technique is put forward to achieve the broadband absorption coating covering large-curvature surfaces, which can achieve a high absorption (>99%) from 400 to 780nm, with good angular tolerance and uniformity.
Wide-angle Broadband Antireflection Coatings with Nano-Taper Hydrated Alumina Film.

Hailan Wang,Chenying Yang,Yusi Wang,Wenjia Yuan,Tingting Zheng,Xiao Chen,Yujie Liu,Yueguang Zhang,Weidong Shen

DOI: https://doi.org/10.1364/oe.464327

IF: 3.8

2022-01-01

Optics Express

Abstract:Wide-angle and broadband antireflection (AR) coating is of the essence in modern optical systems in many fields, which has a great influence on the stray light and imaging quality. A simple and convenient manufacturing method is proposed to address this issue based on a composite coating combining the nano-tapered Al2O3•xH2O (AH) structure and high-low index thin film stack. The optical properties of nano-tapered AH structure at various thickness are first studied and modeled in optics by several homogeneous sub-layers with the graded equivalent index. The designed composite AR coatings are manufactured by vacuum deposition and wet etching subsequently in the hot deionized water. Compared to the common dielectric multilayer antireflection stack, the composite coating presents excellent AR performance. The measured average reflectance values of the double-side coated BK7 glass are as low as 0.40%, 0.41%, 0.56% and 3.13% in 400-1100nm band at angles of incidence (AOI) of 6°, 20°, 40°, and 60°, respectively, while the measured average transmittance at normal incidence increases up to 99.3%. Finally, the process reproductivity, environmental reliability test including long term storage, high temperature annealing and 85°C-85% relative humidity storage of the composite coatings are evaluated. The proposed AR scheme provides a low-cost, efficient, wide-angle and broadband AR coating for kinds of large-curvature components and complex surfaces in fields of consumer electronics, automotive, security, etc.
Atomic Layer Deposition and Its Applications in Optical Thin Films

Junpeng He,ZhangYueguang,Weidong Shen,Xu Liu,Peifu Cu

DOI: https://doi.org/10.13922/j.cnki.cjovst.2009.02.005

2009-01-01

Abstract:The latest progress of atomic layer deposition (ALD) technology for optical coating was tentatively reviewed. First, the film growth conditions, including deposition rate, pressure and substrate temperature were compared with those of the conventional techniques. Besides, the advantages of the ALD technique, including good uniformity and high stability of the film, and easy control of the film thickness were introduced. Next, the influence of the precursors, especially for oxide films, on microstructures and optical properties was discussed. Finally, the strengths and weaknesses of the filters made of ALD films, including antireflection coating(AR), variable refractive index films, laser resistant coatings and ultraviolet (UV) blocking filters were discussed.
A novel trilayer antireflection coating using dip-coating technique

jian xu,yi yin,haiming ma,hui ye,xu liu

DOI: https://doi.org/10.3788/COL201109.073101

IF: 2.56

2011-01-01

Chinese Optics Letters

Abstract:We report a new structure for broadband antireflection coating by dip-coating technique, which has minimal cost and is compatible with large-scale manufacturing. The coatings are prepared by depositing SiO2 sol-gel film on a glass substrate, subsequently depositing SiO2 single-layer particle coating through electrostatic attraction, and depositing a final very thin SiO2 sol-gel film to improve the mechanical strength of the whole coating structure. The refractive index of the structure changes gradually from the top to the substrate. The transmittance of a glass substrate has been experimentally found to be improved in the spectral range of 400-1 400 nm and in the incidence angle range from 0 degrees to at least 45 degrees. The mechanical strength is immensely improved because of the additional thin SiO2 sol-gel layer. The surface texture can be applied to the substrates of different materials and shapes as an add-on coating.
Broadband Absorption Coating for Large-Curvature Surfaces by Atomic Layer Deposition

Tingting Zheng,Chenying Yang,Yueguang Zhang,Hailan Wang,Xiao Chen,Yaguo Li,Qiao Xu,Weidong Shen

DOI: https://doi.org/10.1364/ao.423964

IF: 1.9

2021-01-01

Applied Optics

Abstract:For many applications, large curvature surfaces or complicated 3D structures are required to absorb light that falls on them to reduce stray light or energy collection. A novel, to the best of our knowledge, strategy with a metal–dielectric film stack by the atomic layer deposition technique is put forward to achieve broadband absorption coating covering both sides of a quartz tube completely. Absorptive metallic material of titanium–aluminum–carbon composite and dielectric material of aluminum oxide ( A l 2 O 3 ) is employed to realize high absorption ( > 99 % ) for the 400–780 nm band with the configuration of a six-layer metal–dielectric film stack. Good angle insensitivity up to 50° for P - and S -polarizations is demonstrated experimentally with the proposed structure on a glass slab. The average absorption of the coated quartz tube reaches as high as 99% for all curving areas on the inner and outer sides, while the nonuniformity is confined to 1.5% for the axial and circumferential directions. This presented approach has enormous potential in the fields of optical detection, optical imaging, optical sensing, and energy management.
Optical Properties of Al 2 O 3 Thin Film Fabricated by Atomic Layer Deposition

He Junpeng,Zhang Yueguang,Shen Weidong,Liu Xu,Gu Peifu,何俊鹏 He Junpeng,章岳光 Zhang Yueguang,沈伟东 Shen Weidong,刘旭 Liu Xu,顾培夫 Gu Peifu

DOI: https://doi.org/10.3788/AOS20103001.0277

2010-01-01

Acta Optica Sinica

Abstract:The optical properties of Al2O3 films grown by atomic layer deposition were investigated.Trimethylaluminium(TMA) and water vapour(H2O) were used as the chemical precursors to deposit Al2O3 films on glass substrates at temperature of 250 ℃ and 300 ℃ respectively.Characterization of the films such as optical properties,surface morphological image and microstructure were performed by using spectrophotometer,X-ray diffraction(XRD),X-ray photoelectron spectroscopy(XPS),scanning electron microscope(SEM) and atomic force microscopy(AFM).The results show that both the as-deposited and annealed A12O3 films are amorphous.The surface roughness is as low as 1.2 nm while the packing densities are larger than 0.97.Al2O3 films by this technique exhibit good optical properties with low absorption in the spectral region from mid-ultraviolet to near-infrared.This study indicates that Al2O3 film deposited by ALD is applicable for optical coatings of the materials with midde and low refractive index.
Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition

Mu Wen,Shen Weidong,Yang Chenying,Zheng Xiaowen,Wang Zhen,Yuan Huaxin,Yuan Wenjia,Zhang Yueguang

DOI: https://doi.org/10.3788/aos201939.0324001

2019-01-01

Abstract:The uniformity distributions of the anti-reflection (AR) coatings prepared on the quartz tube surfaces by the atomic layer deposition (ALD) technique as well as the influences of the inner diameter, outer diameter, and quartz tube length on the uniformity distributions of the deposited coatings arc studied. With the single-wavelength AR coatings as the research object, the reflectivity spectrum from the experimental test matches well with the simulated result. The minimum reflectivity on the quartz tube surface is decreased to 0. 17%. If the effect of the sample holder is ignored, the non -uniformity of the AR coatings for the outer and the inner surfaces of the quartz tubes is roughly identical, which is within the range of ++/- 1.69%. The thicknesses and the central wavelengths of the AR coatings for the inner and outer surfaces arc almost identical. Moreover, the variation of the quartz tube size has no obvious effect on the coating uniformity of the outer and inner surfaces. Therefore, the AR coatings with small thickness deviations and similar uniformity distributions can be deposited on the outer and inner surfaces of large curvature elements by the ALD technology.
Preparation of SiO2:TiO2 for High-Performance Double Layer Anti-Reflection Coating

Shahed Zeyed,Alaa Nazar Abd Algaffar

DOI: https://doi.org/10.30723/ijp.v21i2.1110

2023-06-01

Iraqi Journal of Physics

Abstract:In this work, an anti-reflection coating was prepared in the region (400-1000) nm of wavelength, with a double layer of silicon dioxide (SiO2) as an inner layer and the second layer of the mixture (SiO2) and titanium dioxide (TiO2) with certain ratios, as an outer layer using the chemical spraying method with a number of 6 sprays of layer SiO2 and 12 sprays of layer SiO2 - TiO2. Using the method of chemical spraying deposited on the glass as a substrate with a different number of sprays of SiO2, and a fixed number of TiO2-SiO2. The optical and structural properties were determined using UV-Vis spectroscopy and atomic force microscopy (AFM). The results show that by using a mixed layer, the optimal optical performance of a broadband low-reflection ARC (anti-reflection coating) was obtained. The work also reports the comparison of experimental and theoretical results with the help of MATLAB, which relies on the characteristic matrix along the visible region – near-infrared.

English Else
Low-Temperature Preparation of SiO2/Nb2O5/TiO2–SiO2 Broadband Antireflective Coating for the Visible via Acid-Catalyzed Sol–Gel Method

Siyuan Xu,Hongbao Jia,Chunyang Wang,Wenping Zhao,Ying Wang,Chunming Yang,Henan Wu,Jiang Zhu,Biao Wang,Qian Wang

DOI: https://doi.org/10.3390/coatings10080737

IF: 3.236

2020-07-28

Coatings

Abstract:Multilayer broadband antireflective (AR) coatings consisting of porous layers usually suffers poor functional durability. Based on a quarter-half-quarter multilayer structure, AR coatings with dense SiO2 film as the top layer are designed, and refractive index for each layer is optimized. After heat-treated at only 150 °C, refractive index of Nb2O5 film reaches to 2.072 (at 550 nm), which can meet design requirements of the middle layer. TiO2–SiO2 composites with controllable refractive indices are selected to be used as the bottom layer. The obtained triple-layer AR coating presents excellent performance, and the average transmittance at 400–800 nm attains 98.41%. Dense layers endow the multilayer structure good abrasion-resistance, and hexamethyldisilazane is further used to modify the surface of the AR coating, which can greatly improve the hydrophobicity of the coating. The proposed triple-layer broadband AR coating has potential value in practical applications of sol–gel deposition.

materials science, multidisciplinary,physics, applied, coatings & films
Al<sub>2</sub>O<sub>3</sub> anti-reflection coatings with graded-refractive index profile for laser applications

Chaoyi Yin,Meiping Zhu,Tingting Zeng,Jian Sun,Rongjun Zhang,Jiaoling Zhao,Longsheng Wang,Jianda Shao

DOI: https://doi.org/10.1364/OME.418174

2021-01-01

Optical Materials Express

Abstract:Al2O3 coating is chemically unstable in hot water and transforms into a porous structure with a broadband anti-reflection (AR) property. We investigate the influences of treatment time on the AR property and structure morphology of the Al2O3 coating deposited by electron beam evaporation. Al2O3 coating treated for 7 minutes is found to possess the best AR property with an average reflectance of approximately 0.3% in the wavelength range of 350 nm to 1100 nm. The genetic algorithm simulation shows the treated Al2O3 coating possesses a graded-refractive index profile. The scattering calculation shows a large scattering in the short wavelength range. Moreover, we investigate the laser-resistance of the treated Al2O3 coating, and it shows the potential for application in laser systems. (c) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Antireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets.

Bo-huei Liao,Cheng-chung Lee

DOI: https://doi.org/10.1364/OE.19.007507

IF: 3.8

2011-04-11

Optics Express

Abstract:We introduce an innovative technique for the deposition of fluorine doped oxide (F:Al(2)O(3)) films by DC pulse magnetron sputtering from aluminum targets at room temperature. There was almost no change in transmittance even after the film was exposed to air for two weeks. Its refractive index was around 1.69 and the extinction coefficient was smaller than 1.9 × 10(-4) at 193 nm. An AlF(3)/F:Al(2)O(3) antireflection coating was deposited on both sides of a quartz substrate. A high transmittance of 99.32% was attained at the 193 nm wavelength. The cross-sectional morphology showed that the surface of the multilayer films was smooth and there were no columnar or porous structures.

Medicine,Materials Science,Physics
Anti-Corrosion Property of Atomic Layer Deposition Films for Anodized Aluminum

Yi Jia,Mang Yang,Wei Er Lu,Feng Ji,Chao Bo Li,You Tong Fang,Yang Xia

DOI: https://doi.org/10.4028/www.scientific.net/msf.809-810.689

2014-01-01

Materials Science Forum

Abstract:Single and multilayer of Al2O3 and TiO2 were fabricated on anodized aluminum by atomic layer deposition. The effect of processing parameters on pore sealing and anti-corrosion property was studied. It is concluded that the micropores on anodized aluminum could be sealed by atomic layer deposition oxide films through SEM and staining experiments. The anti-corrosive property is affected mainly by the film thickness and process temperature. The acidic drip and salt spray test shows that the anti-corrosion property is enhanced as the film thickness increase. With the similar thickness, Al2O3/TiO2 multilayer film has the best anti-corrosion property, while the single Al2O3 layer appears the poorest. The complementary roles between two basic materials result in the enhanced application property.
Preparation and characterization of Superhydrophilic TiO2-SiO2 films for double-layer broadband antireflective coating

Zhiyong Jin,Zhiwen Deng,Hongbao Jia,Chunming Yang,Ying Wang,Henan Wu,Shihai Zhu,Xiuyi Yang

DOI: https://doi.org/10.1007/s10934-024-01648-y

2024-06-15

Journal of Porous Materials

Abstract:A double-layer broadband antireflective coating with remarkable optical performance and superhydrophilicity has been designed and prepared based on TiO 2 -SiO 2 hybrid films. The synthesis of TiO 2 -SiO 2 composite sols is carried out using titanium isopropoxide and tetraethyl orthosilicate as raw ingredients in an acid-catalyzed system. The TiO 2 -SiO 2 hybrid film with refractive index of 1.61 (at 550 nm) is used as the bottom layer, and the other mesoporous TiO 2 -SiO 2 film templated by an ethylene oxide-propylene oxide-ethylene oxide triblock copolymer is employed as the top layer to achieve the design concept of quarter-half structure. The average transmittance reaches 99.17% in the visible spectral range. The water contact angle of the coating is observed to reduce significantly from 47° to 9.75° by introducing ammonia treatment, indicating that the double-layer coating exhibits superhydrophilicity. Simultaneously, due to the doping of TiO 2 , the double-layer coating possesses a high abrasion resistance. The prepared double-layer antireflective coating has potential application in various areas, like solar cells, eyeglasses and windows of high-rise buildings, etc.

materials science, multidisciplinary,chemistry, physical, applied
Grass-like Alumina with Low Refractive Index for Scalable, Broadband, Omnidirectional Antireflection Coatings on Glass Using Atomic Layer Deposition.

M. Sopanen,C. Kauppinen,K. Isakov

DOI: https://doi.org/10.1021/acsami.7b01733

2017-04-18

Abstract:We present a new type of nanoporous antireflection (AR) coating based on grass-like alumina with a graded refractive index profile. The grass-like alumina AR coating is fabricated using atomic layer deposition (ALD) of alumina and immersion in heated deionized water. Optical transmittance of 99.5% at 500 nm was achieved with average transmittance of 99.0% in the range of 350-800 nm at normal incidence for double-sided coated glass. Angular spectral transmittance (0-80°) of the double-sided AR coated glass was also measured in the range of 350-800 nm and found to have mean spectral transmittance of 94.0% at 60°, 85.0% at 70°, and 53.1% at 80° angles of incidence, respectively. The grass-like alumina AR coating is suitable for mass production with the presented technique: even hundreds of optical components can be coated in parallel. Furthermore, as an ALD-based technique, the coating can be deposited conformally on surfaces with extreme topography, unlike many spin-coating, physical vapor deposition or glancing angle deposition-based coatings used today.

Medicine,Materials Science,Engineering,Physics
Study of Deposition of Al2O3 Nanolayers by Atomic Layer Deposition on the Structured ITO Films

L. K. Markov,A. S. Pavluchenko,I. P. Smirnova,M. V. Mesh,D. S. Kolokolov,A. P. Pushkarev

DOI: https://doi.org/10.1134/s1063782623070151

IF: 0.66

2024-03-14

Semiconductors

Abstract:In this work, the antireflective nanostractured ITO/Al 2 O 3 coatings that have a gradient of the effective refractive index in the direction perpendicular to the substrate plane have been studied. The coatings were obtained by the atomic layer deposition (ALD) of aluminum oxide on the structured ITO films. The transmission electron microscopy showed that the deposited nanosized aluminum oxide layer was of good quality and uniformly covered the ITO whiskers. As shown in experiments, the thickness of the resulting Al 2 O 3 layer is affected by the thickness and, hence, by the degree of surface roughness of the initial ITO film. The resulting thicknesses can be several times lower than that planned in the experiment, based both on the calculations of the parameters of the ALD process and on the direct measurements of the aluminum oxide deposition rate for unstructured ITO films. A possible reason that affects the growth rate of A1O 3 layers in nanostructured ITO films is a strong increase in the surface area of the ITO film during its structuring. So, the transmission and scanning microscopy data for a 700 nm-thick structured ITO film have shown that its surface area is more than 20 times greater than that of a smooth film.

physics, condensed matter
Atomic layer deposition of Al2O3 and HfO2 for high power laser application

Hao Liu,Ping Ma,Yunti Pu,Zuzhen Zhao

DOI: https://doi.org/10.1016/j.jallcom.2020.157751

IF: 6.2

2021-04-01

Journal of Alloys and Compounds

Abstract:Atomic layer deposition has promising application in optical coatings because of the self-terminating feature. An ideally self-terminating ALD process is based on the saturate chemi-sorption and complete purging of the desorbed precursor molecules. The kinetics of adsorption and desorption are analyzed, providing instruction for the development of ALD process. The exposure length is related to the partial pressure and molecule mass, while the purging length is dependent on the physi-sorption potential energy and substrate temperature. The GPC versus pulse length of ALD Al2O3 and HfO2 are measured. With a set of properly selected parameters, film layers with distinctive self-terminating feature are obtained. A coating consisting of several nanolaminates is analyzed with TEM to study the ALD film structure. An anti-reflection coating is deposited, controlling the film thickness by counting the cycles. The laser resistance of the ALD Al2O3 film, HfO2 film and anti-reflection coating is studied. The results certify the analysis and indicate a promising application in developing a self-terminating ALD process for a new material on a new plant.

materials science, multidisciplinary,chemistry, physical,metallurgy & metallurgical engineering
Wide-angle broadband antireflection coatings based on boomerang-like alumina nanostructures in visible region

MirKazem Omrani,Mohammad Malekmohammad,Hosein Zabolian

DOI: https://doi.org/10.1038/s41598-022-04928-2

IF: 4.6

2022-01-18

Scientific Reports

Abstract:Abstract A novel boomerang-like alumina based antireflective coating with ultra-low reflectance has been produced for light incidence angles form 0 up to 45°. Boomerang-like alumina nanostructures have been fabricated on the BK7 glass substrates by dip-coating and surface modification via hot water treatment. To achieve the lowest residual reflectance, the effect of dip-coating rate and hot-water temperature in the treatment process has been investigated and optimized. To further investigate the boomerang-like alumina nanostructure and extract its graded refractive index profile by fitting the measured reflectance spectrum with the simulated one, a simulation based on the finite-difference time-domain (FDTD) method has been performed. The average reflectance measured at normal incidence for double-sided coated BK7 glass substrates is only 0.3% in the visible spectral region. Considering both sides, the average reflectance of the substrate decreased in the spectral range of 400–700 nm down to 0.4% at incidence angles of 45° by applying the boomerang-like alumina antireflection coatings. The optimized single layer boomerang-like alumina coating on the curved aspheric lens exhibited a low average reflectance of less than 0.14% and an average transmittance of above 99.3% at normal incidence. The presented process is a simple and cost-effective route towards broadband and omnidirectional antireflection coatings, which have promising potential to be applied on substrates having large scales with complex geometric shapes.

multidisciplinary sciences

Atomic Layer Deposition of Al2O3 and TiO2 Multilayers for Application As Broadband Antireflection Coating

Precise broad-band anti-refection coating fabricated by atomic layer deposition

Anti-reflection Coating at 550 Nm Fabricated by Atomic Layer Deposition

Wide-angle Broadband Antireflection with Nano-taper Hydrated Alumina Film

Broadband Absorption Coating for Large- Curvature Surfaces by Atomic Layer Deposition

Wide-angle Broadband Antireflection Coatings with Nano-Taper Hydrated Alumina Film.

Atomic Layer Deposition and Its Applications in Optical Thin Films

A novel trilayer antireflection coating using dip-coating technique

Broadband Absorption Coating for Large-Curvature Surfaces by Atomic Layer Deposition

Optical Properties of Al 2 O 3 Thin Film Fabricated by Atomic Layer Deposition

Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition

Preparation of SiO2:TiO2 for High-Performance Double Layer Anti-Reflection Coating

Low-Temperature Preparation of SiO2/Nb2O5/TiO2–SiO2 Broadband Antireflective Coating for the Visible via Acid-Catalyzed Sol–Gel Method

Al<sub>2</sub>O<sub>3</sub> anti-reflection coatings with graded-refractive index profile for laser applications

Antireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets.

Anti-Corrosion Property of Atomic Layer Deposition Films for Anodized Aluminum

Preparation and characterization of Superhydrophilic TiO2-SiO2 films for double-layer broadband antireflective coating

Grass-like Alumina with Low Refractive Index for Scalable, Broadband, Omnidirectional Antireflection Coatings on Glass Using Atomic Layer Deposition.

Study of Deposition of Al2O3 Nanolayers by Atomic Layer Deposition on the Structured ITO Films

Atomic layer deposition of Al2O3 and HfO2 for high power laser application

Wide-angle broadband antireflection coatings based on boomerang-like alumina nanostructures in visible region