New DRIE-Patterned Electrets for Vibration Energy Harvesting

S. Boisseau,A. -B. Duret,J. -J. Chaillout,G. Despesse,A.-B. Duret,J.-J. Chaillout
DOI: https://doi.org/10.48550/arXiv.1205.2383
2012-05-10
Materials Science
Abstract:This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret-based Vibration Energy Harvesters (e-VEH). This process consists in forming continuous layers of SiO2/Si3N4 electrets in order to limit surface conduction phenomena and is a new way to see the problem of electret patterning. Experimental results prove that patterned electrets charged by a positive corona discharge show excellent stability with high surface charge densities that may reach 5mC/m^2 on 1.1\mu m-thick layers, even with fine patterning and harsh temperature conditions (up to 250{\deg}C). This paves the way to new e-VEH designs and manufacturing processes.
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