Abstract:Electrodes are essential parts of capacitors that can consist of a variety of materials depending on the application. In dielectric elastomer transducers (DETs)—a type of special variable capacitor—the electrode needs to deform with a soft base. However, the current carbon-based electrodes are not stable, and the metal-based ones are not flexible for use in DETs. Thus, the need to fabricate an electrode which can meet both the stability and flexibility requirements is extremely important. In this work, silver ions with energy levels of 40 keV were implanted into the surface of polydimethylsiloxane (PDMS) to explore the effect of ion implantation on surface conductivity. The experimental results showed that the surface resistivity of PDMS reached 251.85 kΩ per square and dropped by 10 orders of magnitude after ion implantation. This indicates that the surface conductivity was significantly improved. EDS characterization results showed that the maximum penetration depth that ions could reach was about 2.5 μm. The surface resistivity of the sample coated with carbon black was further reduced by an order of magnitude after ion implantation and changed more stably with time. A quasi-melting-collision model was established to investigate the distribution of carbon black particles. The concentration of carbon black particles at a distance from the PDMS surface followed a Gaussian-like distribution.

Preparation and charge stability of SiO2/Si3N4 double layer electret used in micro electro mechanical system

PECVD SiO2/Si3N4 Double-layer Electrets for Application in Micro-devices

PECVD SiO2/Si3N4 DOUBLE LAYERS ELECTRETS FOR APPLICATION IN MEMS POWER GENERATOR

PECVD SiO2/Si3N4 Double Layers Electrets on Glass Substrate

PECVD prepared Si2/Si3 N4 double layers electrets

Investigation on micromachining technology compatibility of PECVD SiO 2/Si3N4 double-layer electrets

Charge Distribution and Stability of SiO<sub>2</sub> Nanoarray Electret

Study on PECVD SiO 2 /Si 3 N 4 double-layer electrets with different thicknesses

Improvement of the Performance of the Pecvd Sio2/Si3n4 Double-Layer Electrets

Effects Of Different Si3n4 Thicknesses On The Performance Of Pecvd Sio2/Si3n4 Double Layers Electrets

Mechanical Characteristics of Sio2 Electrets

Deposition of Dense SiO2 Thin Films for Electrical Insulation Applications by Microwave ECR Plasma Source Enhanced RF Reactive Magnetron Sputtering

Lithiation of SiO2 in Li-ion Batteries: in Situ Transmission Electron Microscopy Experiments and Theoretical Studies.

New DRIE-Patterned Electrets for Vibration Energy Harvesting

Electrosorption Capacitance of Nanostructured Carbon-Based Materials

Silicon Based Polytetrafluoroethylene Electrets: Preparation and Corona Charging Characteristics

Charge Storage in Si-nanocrystals Embedded NOS Structure Characterized by Kelvin Probe Force Microscopy

Preparation and Characterization of Three-Dimensional Micro-Electrode for Micro-Supercapacitor Based on Inductively Coupled Plasma Reactive Etching Technology

Study of a Mixed Conductive Layer Fabricated by Ion Implantation and Distribution Theory

Double-level Charge Storage in Self-Aligned Doubly-Stacked Si Nanocrystals in SiN X Dielectric