Study of a Mixed Conductive Layer Fabricated by Ion Implantation and Distribution Theory

Xuerui Fan,Huiyan Zhang,Yi Wei,Yao Huang,Huimei He,Yun Wang,Qingyun Meng,Wenjie Wu

DOI: https://doi.org/10.3390/polym15020270

IF: 5

2023-01-06

Polymers

Abstract:Electrodes are essential parts of capacitors that can consist of a variety of materials depending on the application. In dielectric elastomer transducers (DETs)—a type of special variable capacitor—the electrode needs to deform with a soft base. However, the current carbon-based electrodes are not stable, and the metal-based ones are not flexible for use in DETs. Thus, the need to fabricate an electrode which can meet both the stability and flexibility requirements is extremely important. In this work, silver ions with energy levels of 40 keV were implanted into the surface of polydimethylsiloxane (PDMS) to explore the effect of ion implantation on surface conductivity. The experimental results showed that the surface resistivity of PDMS reached 251.85 kΩ per square and dropped by 10 orders of magnitude after ion implantation. This indicates that the surface conductivity was significantly improved. EDS characterization results showed that the maximum penetration depth that ions could reach was about 2.5 μm. The surface resistivity of the sample coated with carbon black was further reduced by an order of magnitude after ion implantation and changed more stably with time. A quasi-melting-collision model was established to investigate the distribution of carbon black particles. The concentration of carbon black particles at a distance from the PDMS surface followed a Gaussian-like distribution.

polymer science

What problem does this paper attempt to address?

### Problems Addressed by the Paper The paper aims to address the issue of electrode materials in dielectric elastomer transducers (DETs). Specifically, DETs are a type of variable capacitor where the electrodes need to deform along with the soft substrate. However, the currently used carbon-based electrodes are not stable enough, and metal-based electrodes lack flexibility, making them unsuitable for DETs. Therefore, developing an electrode material that meets both stability and flexibility requirements is crucial. The paper explores the effect of ion implantation on surface conductivity by injecting silver ions into the surface of polydimethylsiloxane (PDMS). Experimental results show that after ion implantation, the surface resistivity of PDMS decreased by 10 orders of magnitude from its original level, reaching 251.85 kΩ/square, indicating a significant improvement in surface conductivity. Additionally, the surface resistivity of samples coated with carbon black particles further decreased by an order of magnitude after ion implantation and remained more stable over time. To further study the distribution of carbon black particles in PDMS, the paper proposes a quasi-melting collision model and establishes a distribution theory for carbon black particles. Experimental results indicate that the maximum penetration depth of carbon black particles below the PDMS surface is approximately 2.5 μm, and their concentration follows a Gaussian distribution with distance from the PDMS surface. In summary, the paper aims to develop a new flexible electrode material by using silver ion implantation and carbon black particle coating to address the stability and flexibility issues of electrode materials in dielectric elastomer transducers.

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