Fabrication and Characterization of Embedded Capacitors Based on Novel Nanocomposite As Dielectric Materials

谢丹,武潇,任天令,刘理天,党智敏

DOI: https://doi.org/10.3969/j.issn.1672-6030.2010.05.014

2010-01-01

Nanotechnology and Precision Engineering

Abstract:Embedded capacitor technique is an approach to miniaturizing electronic devices and enhancing their performance and reliability. Therefore, it is of great importance to study high dielectric materials that can be used in embedded environment. In this paper, barium titanate (BaTiO3) particles with average size of 92 nm were used as inorganic nano-fillers and polyimide (PI) was adopted as matrix to fabricate the novel BaTiO3/PI nanocomposite dielectric films, whose dielectric properties, electric breakdown strength and temperature properties were tested. The film was patterned, sputtered and etched to fabricate a prototype embedded capacitor, dielectric properties of which were also tested. Test results indicate that the prototype embedded capacitor has dielectric permittivity higher than 15 at low frequency and electric breakdown strength above 58 MV/m, and etching and sputtering have little impact on the films dielectric properties.