Structural Characterization of Indium-Rich Nanoprecipitate in InGaN V-pits Formed by Annealing

Junjun Xue,Qing Cai,Baohua Zhang,Mei Ge,Dunjun Chen,Ting Zhi,Jiangwei Chen,Lianhui Wang,Rong Zhang,Youdou Zheng
DOI: https://doi.org/10.1088/1674-1056/26/11/116801
2017-01-01
Abstract:InGaN layers capped with GaN were annealed at 550 degrees C for 1 hour. During annealing, cracks appeared and dissolved InGaN penetrated through the microcracks into the V-pits to form indium-rich nanoprecipitates. Some precipitates, in-situ annealed under nitrogen ion irradiation by MBE, were confirmed to be cubic GaN on the tops of precipitates, formed by nitriding the pre-existing Ga droplets under nitrogen ions irradiation.
What problem does this paper attempt to address?