High-indium-content InGaN Quantum-Well Structure Grown Pseudomorphically on a Strain-Relaxed InGaN Template Layer

Yanli Liu,Dunjun Chen,Junjun Xue,Bin Liu,Hai Lu,Rong Zhang,Youdou Zheng,Ke Xu,Jinping Zhang,Bentao Cui,Andrew M. Wowchak,Amir M. Dabiran
DOI: https://doi.org/10.1116/1.4705375
2012-01-01
Abstract:A high-indium-content InGaN quantum-well structure was grown on a strain-relaxed InGaN template to reduce structural strain induced by lattice mismatch. The results show that the InGaN template, following a nanosculpting process, can maintain the good crystal quality of the underlying GaN layer and provide a new lattice parameter for pseudomorphically growing a high-indium-content quantum-well structure, and the fourth-order satellite peak of the multi-quantum-well structure is clearly distinguishable. Atom misalignment, a strain gradient, and a composition undulation along the growth direction in the quantum-well structure were not observed by high-resolution transmission electron microscopy and selected area diffraction.
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