Effect of Indium Droplets on Growth of InGaN Film by Molecular Beam Epitaxy

Xiantong Zheng,Hongwei Liang,Ping Wang,Xiaoxiao Sun,Zhaoying Chen,Tao Wang,Bowen Sheng,Yixin Wang,Ling Chen,Ding Wang,Xin Rong,Mo Li,Jian Zhang,Xinqiang Wang
DOI: https://doi.org/10.1016/j.spmi.2017.11.053
IF: 3.22
2018-01-01
Superlattices and Microstructures
Abstract:Effect of indium (In) droplets on InGaN thin films grown by molecular beam epitaxy (MBE) has been investigated. The surface of InGaN covered by In droplets shows a smoother topography than that without droplets, indicating that the presence of In droplets is beneficial to the two dimensional growth. Beneath the In droplets, many ring-like structures are observed. The arrangement of these “ring” shows the movement of the In droplets during the InGaN growth. A qualitative growth model is proposed to explain the evolution of the InGaN surface morphology in In-droplet-induced-epitaxy process, giving an explanation that a local vapor-liquid-solid (VLS) system is preferentially formed at the edge of the droplets, leading to a high growth rate. Furthermore, the energy dispersive X-ray spectroscopy results reveal that the relatively higher In/Ga flux ratio in the region covered by the In droplet results in a locally higher In content.
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