Catalyst Synthesis and Growth of Indium Nitride Nanodots

ZL Xie,R Zhang,ZX Bi,B Liu,XQ Xiu,SL Gu,B Shen,Y Shi,YD Zheng
DOI: https://doi.org/10.1109/sim.2005.1511406
2004-01-01
Abstract:The technique of indium droplets catalyst is used for the synthesis of InN nanodots on (0001) sapphire substrates via metalorganic chemical vapor ldeposition (MOCVD) technique using trimethyindium(TMIn: (CH3)(3)In) and NH3. The morphology evolution of the InN nanodots are studied by AFM. The structure of the prepared sample is characterized by X-ray diffraction (XRD) and Raman scattering. And the XPS has been used to investigate the elemental composition of InN nanodots. Our results demonstrate that In droplets catalyst MOCVD can be a very effective way to grow InN nanodots.
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