Growth and Characterization of Self-Assembled Low-Indium Composition Ingan Nanodots by Alternate Admittance of Precursors

Wei Zhao,Lai Wang,Jiaxing Wang,Wenbin Lv,Zhibiao Hao,Yi Luo
DOI: https://doi.org/10.1002/pssa.201127368
2012-01-01
Abstract:Low-indium composition InGaN nanodots are grown on GaN/Al2O3 by alternate admittance of triethylgallium (TEGa), trimethylindium (TMIn), and ammonia (NH3) using metalorganic vapor phase epitaxy. Since the lattice mismatch between metal (Ga, In) and GaN is large during the admittance of group III precursors and the alternate admittance of precursors can enhance the surface diffusion of adatoms, it is believed that the growth mode of InGaN nanodots is the VolmerWeber mode. The admittance time is optimized and injecting TMIn with NH3 can increase indium composition. The ultraviolet photoluminescence spectra exhibit small temperature-dependent redshift and a sensitive intensity change dependent on indium composition.
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