Growth Study of Indium-Catalyzed Silicon Nanowires by Plasma Enhanced Chemical Vapor Deposition

I. Zardo,S. Conesa-Boj,S. Estradé,L. Yu,F. Peiro,P. Roca i Cabarrocas,J. R. Morante,J. Arbiol,A. Fontcuberta i Morral
DOI: https://doi.org/10.1007/s00339-010-5802-1
2010-01-01
Abstract:Indium was used as a catalyst for the synthesis of silicon nanowires in a plasma enhanced chemical vapor deposition reactor. In order to foster the catalytic activity of indium, the indium droplets had to be exposed to a hydrogen plasma prior to nanowire growth in a silane plasma. The structure of the nanowires was investigated as a function of the growth conditions by electron microscopy and Raman spectroscopy. The nanowires were found to crystallize along the <111>, <112> or <001> growth direction. When growing on the <112> and <111> directions, they revealed a similar crystal quality and the presence of a high density of twins along the {111} planes. The high density and periodicity of these twins lead to the formation of hexagonal domains inside the cubic structure. The corresponding Raman signature was found to be a peak at 495 cm−1, in agreement with previous studies. Finally, electron energy loss spectroscopy indicates an occasional migration of indium during growth.
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