Very Small Snapback Silicon-Controlled Rectifier for Electrostatic Discharge Protection in 28 Nm Processing.

Weihuai Wang,Hao Jin,Wei Guo,Shurong Dong,Wei Liang,Juin J. Liou,Yan Han
DOI: https://doi.org/10.1016/j.microrel.2015.12.038
IF: 1.6
2016-01-01
Microelectronics Reliability
Abstract:A novel silicon-controlled rectifier (SCR)-based device with very small snapback is proposed in this paper. New features including an embedded gate-to-VDD PMOS (GDPMOS) and lateral n-p-n BJT are used to achieve low trigger and high holding voltages suitable for electrostatic discharge (ESD) protection of 28-nm CMOS technology with very narrow ESD operation windows. Measured results show an ESD operation window of less than 1V. TCAD simulation is also carried out to demonstrate the underlying physical mechanisms.
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