Novel Capacitance Coupling Complementary Dual-Direction SCR for High-Voltage ESD

Shurong Dong,Hao Jin,Meng Miao,Jian Wu,Juin J. Liou
DOI: https://doi.org/10.1109/led.2012.2188015
IF: 4.8157
2012-01-01
IEEE Electron Device Letters
Abstract:A novel capacitance coupling complementary dual-direction silicon-controlled rectifier (SCR) (CCCDSCR) for high-voltage electrostatic discharge protection is proposed and verified in 0.5-μm BCD process. The trigger voltage of CCCDSCR can be adjusted by coupling capacitance to meet different protection requirements. Compared with traditional lateral double-diffusion NMOS, LDSCR, stacked field-oxide device, and stacked low-voltage-triggering SCR devices, the CCCDSCR has appropriate low trigger voltage of 27.3 V, high holding voltage of 24.3 V, and highest figure of merit (FOM) according to our defined FOM.
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