An Investigation on Capacitance-Trigger ESD Protection Devices for High Voltage Integrated Circuits

Hailian Liang,Weidong Nie,Xiaofeng Gu,Shurong Dong,W. S. Lau
DOI: https://doi.org/10.1016/j.microrel.2013.11.002
IF: 1.6
2014-01-01
Microelectronics Reliability
Abstract:A novel cascaded complementary dual-directional silicon controlled rectifier (CCDSCR) structure has been proposed and implemented in a 0.5 mu m 20 V Bipolar/CMOS/DMOS process as an ESD (electrostatic discharge) protection device. The ESD characteristics of the capacitance-trigger CCDSCR has been investigated by transmission line pulse (TLP) testing. Compared with the substrate-trigger insulated gate bipolar transistor with the enhanced substrate parasitic capacitance, the gate-driven trigger insulated gate bipolar transistor with the gate coupling capacitance and the normal dual-directional silicon controlled rectifier, the CCDSCR has the highest holding voltage of about 25.4 V and the best current conduction uniformity. In addition, it has the best figure of merit (FOM) with the value of about 0.64 mA/mu m(2). The good current conduction uniformity in CCDSCR due to the enhanced substrate parasitic capacitance-trigger effect is finally confirmed by Sentaurus simulations. (C) 2013 Elsevier Ltd. All rights reserved.
What problem does this paper attempt to address?