Abstract:As well-known,heteroepitaxial growth on sapphire is mainly employed to obtain optoelectronic(devices) because there is no suitable substrate matching with GaN.Therefore,the GaN layer suffers from a stress due to large difference in lattice constants and thermal expansion coefficients between the GaN and sapphire.To improve the quality of devices,the epitaxial lateral overgrowth(ELO) technique is applied to GaN.ELO-GaN on patterned SiO_2/GaN/α-Al_2O_3 substrate is grown by metalorganic chemical vapor deposition(MOCVD).First,a high quality 3 μm thick layer of GaN is grown by MOCVD.Next,standard deposition and photolithographic techniques are employed to prepare a set of parallel SiO_2 stripes oriented along a(〈11-00〉) GaN crystal direction separated by window areas which expose the underlying GaN.A second deposition of GaN onto this patterned substrate is then initiated.During the initial GaN growth,the SiO_2 stripes function as nonwettable surfaces and no GaN deposition occurs on them.However,once the GaN film growth from the window stripes reaches the tops of the SiO_2 stripes,epitaxial lateral overgrowth of GaN commences.The GaN thickness of the second step growth is about 10 μm.The results of a systematic study of the ELO-GaN on sapphire are reported.Atomic force microscopy(AFM) images showed that the surface of ELO-GaN is smooth and that there are linear-configuration hillocks in the middle of mask region,which are caused by the misorientation of crystalline when the ELO-GaN coalesce above the masks.The X-ray diffraction(XRD) curve revealed that the tilts in the(〈11-20〉) direction between GaN in window regions and mask regions are about 1.2°.Raman scattering spectrum revealed that the stress in the mask region is smaller than that in the window region and also the quality of GaN is much higher in the mask region.As a result,the quality of GaN crystalloid is effectively improved by MOCVD using the ELO technique.

Silane controlled three dimensional GaN growth and recovery stages on a cone-shape nanoscale patterned sapphire substrate by MOCVD

MOCVD Growth of Device-Quality GaN on Sapphire Using a Three-Step Approach

Selective Growth of GaN on Slope Cone-Shaped Patterned Sapphire Substrate

Nucleation Mechanism of GaN Growth on Wet Etched Pattern Sapphire Substrates

Nano selective area growth of GaN by MOVPE on 4H-SiC using epitaxial graphene as a mask: towards integrated III-nitride / graphene / SiC electronics and optoelectronics

Control of GaN inverted pyramids growth on c-plane patterned sapphire substrates

Impact of GaN Transition Layers in the Growth of GaN Epitaxial Layer on Silicon

A Study of GaN Nucleation and Coalescence in the Initial Growth Stages on Nanoscale Patterned Sapphire Substrates Via MOCVD

Growth of GaN epitaxial films on polycrystalline diamond by metal-organic vapor phase epitaxy

The Anti-Surfactant Effect of Silane on the Facets-Controlled Growth of Gan Nanorods by Mocvd

"WM"-Shaped Growth of GaN on Patterned Sapphire Substrates

Morphology Evolution of MOCVD Grown GaN Epitaxial Layers on Nanopss

The Growth and Characterization of GaN Films on Cone-Shaped Patterned Sapphire by MOCVD

Growth of Freestanding GaN Crystals on Three-Dimensional Mesh Porous Substrate by HVPE

Origin of Selective Growth of GaN on Maskless V-Grooved Sapphire Substrates by Metalorganic Chemical Vapor Deposition

Silicon-induced Strain Relaxation and Enhanced Gallium Surfactant Effects on Gallium Nitride Island Shaping

Structural Characterization of Epitaxial Lateral Overgrowth GaN by MOCVD

Investigation of nanopatterned c-plane sapphire Substrates for Growths of polar and nonpolar GaN epilayers

Epitaxy of M-Plane GaN on Nanoscale Patterned C-Plane Sapphire Substrates

Crystalline Quality Improvement of GaN Coalesced Using Nano‐pss with Void‐embedded Nanostructure by MOVPE

In situ asymmetric island sidewall growth of high-quality semipolar (112) GaN on m-plane sapphire