Carbon-doped Cu Films with Self-Forming Passivation Layer

X. N. Li,J. X. Ding,L. Y. Xu,C. M. Bao,J. P. Chu,C. Dong
DOI: https://doi.org/10.1016/j.surfcoat.2014.01.007
IF: 4.865
2014-01-01
Surface and Coatings Technology
Abstract:It was previously known that C-doping in Cu effectively enhances the film thermal stability and maintains a low electrical resistivity even upon high-temperature annealing, via a diffusion inhibiting the mechanism of C-stabilized oxide interlayer between Cu and Si. In the present work, the stability and resistivity are investigated in two Cu films doped with more C, respectively 2.9at.% and 4.2at.% as measured by EPMA. As expected, the thermal stability is even further enhanced, without significantly affecting the resistivity. After a systematic microstructural investigation by TEM, it is revealed that the relevant mechanism lies both in the enhanced stability via C dissolution in the silica native oxide layer at the Cu/Si interface and in the C-passivated Si surface zone beneath the layer. In the 4.2% C film, the Cu/Si interaction is mainly inhibited by self-forming SiC nano-particles and the resistivity remains below 3μΩ·cm even upon annealing at 500°C for 40h. The C-doping can then be a simple process route towards manufacturing stable Cu interconnects.
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