Tid Radiation Response of 3-D Vertical Gaa Sonos Memory Cells

Fengying Qiao,Liyang Pan,Pieter Blomme,Antonio Arreghini,Lifang Liu,Geert Van den Bosch,Jan Van Houdt,Jun Xu
DOI: https://doi.org/10.1109/tns.2014.2303860
IF: 1.703
2014-01-01
IEEE Transactions on Nuclear Science
Abstract:The total ionizing dose response against the γ ray of 3-D silicon-oxide-nitride-oxide-nitride (SONOS) cells with a vertical polysilicon channel was investigated. No leakage current increase or subthreshold slope degradation is observed up to the total ionizing dose of 1 Mrad(Si) even for devices scaled down to 22 nm, as the gate-all-around structure provides better control over the potential in the body, and shallow trench isolation oxide is not required. The threshold voltage (V T ) shifts trend during radiation is similar to the behavior of 2-D cells, and can be well predicted with McWhorter's model. Benefiting from a larger initial memory window before irradiation, 3-D SONOS cells have a significant memory window of 4.5 V after exposure to a high radiation dose of 1 Mrad(Si). These results clearly indicate that 3-D SONOS devices are promising as radiation-tolerant memories.
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