Total ionizing dose effects of novel vertical channel double-gate nMOSFETs

Xia An,Qing Lu,Ru Huang,Wenhua Wang,Shoubin Xue,Baoping He,Xing Zhang
DOI: https://doi.org/10.1088/0268-1242/24/8/085012
IF: 2.048
2009-01-01
Semiconductor Science and Technology
Abstract:The total ionizing dose effects of novel vertical channel double-gate nMOSFETs (DGMOS) are experimentally investigated and compared with conventional planar nMOSFETs firstly in this paper. The radiation-induced off-state leakage current and subthreshold slope are greatly suppressed in vertical DGMOS devices compared with conventional nMOSFETs. The performance of vertical DGMOS devices under irradiation does not change apparently even when the dose is up to 1 Mrad(Si), which is attributed to its unique device structure for separating the channel from the thick oxide isolation region and preventing the formation of a leakage path. The results indicate that the vertical channel device structure is a promising candidate for future space applications.
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