Total Ionizing Radiation Effects of 2-T SONOS for 130 Nm/4 Mb NOR Flash Memory Technology

FengYing Qiao,LiYang Pan,Xiao Yu,HaoZhi Ma,Dong Wu,Jun Xu
DOI: https://doi.org/10.1007/s11432-013-4982-7
2014-01-01
Science China Information Sciences
Abstract:In this paper, we have studied the total ionizing dose (TID) radiation response up to 2 Mrad(Si) of silicon-oxide-nitride-oxide-silicon (SONOS) memory cells and memory circuits, fabricated in a 130 nm complimentary metal-oxide-semiconductor (CMOS) SONOS technology. We explored the threshold voltage (V T ) degradation mechanism and found that the V T shifts of SONOS cells depend on the charge state; simply programming the cell to a higher V T cannot compensate for the radiation induced V T loss. The off-state current (I off) increase in the SONOS cell is also studied in this paper. Both V T and I off degradation would affect the memory system. Read data failures are mainly caused by V T shifts under irradiation, and program and erase failures are mainly caused by increased I off, which overloads the charge pumping circuit. By varying the reference current, our 4 Mb NOR flash chip has the potential to survive a radiation dose of 1 Mrad(Si) in read mode.
What problem does this paper attempt to address?