Fabrication of IR Reflectors by Porous Silicon Technique

Zhejin Wang,Wang, Lianwei,Zheng, Yuxiang,Xiaoshuang Chen
DOI: https://doi.org/10.1109/icsict.2006.306645
2006-01-01
Abstract:Omnidirectional mirrors worked in mid-infrared made by periodically repeating two different refractive index layers of fully and partially oxidized porous silicon have been reported. A reflector structural with good thermal isolation properties is proposed in this report. Oxidation properties of porous silicon multilayer structure have been investigated and the oxidization behavior as well as its microstructure has been investigated
What problem does this paper attempt to address?