Zro2-Tio2 Thin Films and Resonators for Mid-Infrared Integrated Photonics

Feipeng Jiang,Ningyuan Duan,Hongtao Lin,Lan Li,Juejun Hu,Lei Bi,Haipeng Lu,Xiaolong Weng,Jianliang Xie,Longjiang Deng
DOI: https://doi.org/10.1117/12.2038415
2014-01-01
Abstract:We present a novel MIR transparent ZrO 2 -TiO 2 thin film material system deposited at room temperature. Micro disk resonator showing high quality factor at 5.2 μm wavelength is demonstrated, indicating their promising potential for integrated MIR photonic applications.
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