Abstract:Photonic integrated circuits based on Lithium Niobate have demonstrated the vast capabilities afforded by material with a high Pockels coefficient, allowing linear and high-speed modulators operating at CMOS voltage levels for applications ranging from data-center communications and photonic accelerators for AI. However despite major progress, the industrial adoption of this technology is compounded by the high cost per wafer. Here we overcome this challenge and demonstrate a photonic platform that satisfies the dichotomy of allowing scalable manufacturing at low cost, while at the same time exhibiting equal, and superior properties to those of Lithium Niobate. We demonstrate that it is possible to manufacture low loss photonic integrated circuits using Lithium Tantalate, a material that is already commercially adopted for acoustic filters in 5G and 6G. We show that LiTaO3 posses equally attractive optical properties and can be etched with high precision and negligible residues using DUV lithography, diamond like carbon (DLC) as a hard mask and alkaline wet etching. Using this approach we demonstrate microresonators with an intrinsic cavity linewidth of 26.8 MHz, corresponding to a linear loss of 5.6 dB/m and demonstrate a Mach Zehnder modulator with Vpi L = 4.2 V cm half-wave voltage length product. In comparison to Lithium Niobate, the photonic integrated circuits based on LiTaO3 exhibit a much lower birefringence, allowing high-density circuits and broadband operation over all telecommunication bands (O to L band), exhibit higher photorefractive damage threshold, and lower microwave loss tangent. Moreover, we show that the platform supports generation of soliton microcombs in X-Cut LiTaO3 racetrack microresonator with electronically detectable repetition rate, i.e. 30.1 GHz.

Integrated TiO2 resonators for visible photonics

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Zro2-Tio2 Thin Films and Resonators for Mid-Infrared Integrated Photonics

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Passive Devices at 2 Μm Wavelength on 200 Mm CMOS-compatible Silicon Photonics Platform [Invited]

Demonstration of High-Q Mid-Infrared Chalcogenide Glass-On-Silicon Resonators

Titanium-Based Metasurfaces for Optoelectronics

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Tunable broadband two-point-coupled ultra-high-Q visible and near-infrared photonic integrated resonators

ZrO2-TiO2 thin films: A new material system for mid-infrared integrated photonics

Ultrathin WS2‐on‐Glass Photonic Crystal for Self‐Resonant Exciton‐Polaritonics

Flexible Waveguide Integrated Thermo-Optic Switch Based on TiO2 Platform

Foldable and Cytocompatible Sol-Gel Tio2 Photonics

Compact titanium dioxide waveguides with high nonlinearity at telecommunication wavelengths

Integrated transition edge sensors on titanium in-diffused lithium niobate waveguides

Amorphous silicon-doped titania films for on-chip photonics

Topologically Enabled Ultra-high-Q Guided Resonances Robust to Out-of-plane Scattering

Lithium tantalate electro-optical photonic integrated circuits for high volume manufacturing

Photocatalytic oxidation in few-layer Tellurene for loss-invariant integrated photonic resonance trimming

Athermal high-Q tantalum-pentoxide-based microresonators on silicon substrates

Vertical optical ring resonators fully integrated with nanophotonic waveguides on silicon-on-insulator substrates