Heterogeneously integrated MIR silicon photonics

Yu Chen,Hongtao Lin,Juejun Hu,Mo Li
DOI: https://doi.org/10.1364/cleo_si.2014.sw1m.5
2014-01-01
Abstract:By utilizing heterogeneous integration method, integrated silicon photonics on mid-IR compatible substrate has been fabricated and on-chip cavity-enhanced mid-IR spectroscopic analysis of organic chemicals has been demonstrated.
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