The SPDT RF MEMS Switch with Isolation between Bias and Signal

HUANG Jiwei,WANG Zhigong
DOI: https://doi.org/10.3969/j.issn.1000-3819.2007.03.019
2007-01-01
Abstract:A DC-5 GHz single-pole double-throw (SPDT) radio frequency micro-electro-mechanical systems (RF MEMS) switch that employs lateral metal-metal contacting is designed. It consists of a set of quasi-finite ground coplanar waveguide (FGCPW) transmission lines and a left right swing cantilever beam. The use of an insulation dielectric layer provides the isolation between bias and RF signal. According to different states of switch, relevant equivalent circuit models are investigated to optimize switch performance. The devices have been successfully fabricated using the MetalMUMPs process. The measurement results show an isolation of 40 dB at 5 GHz. The insertion loss of the switch is 0.8 dB and return loss is 20 dB at 5 GHz. The threshold voltage is about 59 V.
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