Fabrication of Position-controllable GaN Nanostructures

Zhenchuan Yang,Baoshun Zhang,Kei May Lau,Kevin J. Chen
DOI: https://doi.org/10.1109/nems.2007.352183
2007-01-01
Abstract:We develop a technique for fabrication position-controllable GaN nanostructures. The fabrication process combines selective area growth of GaN structures on patterned substrate and wet chemical etching of the grown GaN structures. GaN nano-tips, nano-pillars and nano-blades are fabricated to demonstrate this technique. The mechanisms of the fabrication process are also discussed.
What problem does this paper attempt to address?