Fabrication Of Vertical Position-Controllable Gan Nanowires On (111) Si Substrate

Congshun Wang,Zhenchuan Yang,Baoshun Zhang,Yong Wang,Hui Wang,Keimay Lau,Kevinjing Chen
DOI: https://doi.org/10.1109/NANO.2007.4601308
2007-01-01
Abstract:A technique for fabrication vertical position-controllable GaN nanowires is developed and discussed. The fabrication process combines selective area growth of GaN pyramids on substrate masked with hexagonal hole pattern and wet chemical etching of the grown GaN pyramids. GaN nanowires are fabricated to demonstrate this technique. The mechanisms for the formation of the vertical nanowires are also further discussed by using the contrastive experiments.
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