Fabrication of GaN Nanocolumns with Semipolar Plane Using Ni Nano-Island Masks

Yang Guofeng,Chen Peng,Yu Zhiguo,Liu Bin,Xie Zili,Xiu Xiangqian,Han Ping,Zhao Hong,Hua Xuemei,Zhang Rong
DOI: https://doi.org/10.3969/j.issn.1003-353x.2011.06.001
2011-01-01
Abstract:A novel and simple method to fabricate GaN nanocolumns was reported,using inductively coupled plasma(ICP) etching with Ni nano-island masks.Atomic force microscope(AFM) results indicate the formation of Ni nano islands through rapid thermal annealing(RTA) under different temperatures.And the average diameter and height of the Ni nano-island is 325 nm and 70 nm,respectively.Scanning electron microscope(SEM) pictures show that using the pattern of Ni nano-island as the ICP mask,the uniform and ordered GaN nanocolumn arrays with semipolar plane were obtained by controlling the ICP etching time(2 min).This novel semipolar GaN nanocolumn can be used as the mask of growing quantum well and superlattice with decreased polarization field,which would enhance the performance of optoelectronic devices.
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