The enhanced GaN deposition on highly N-incorporated diamond substrate
Yuan Gao,Shengrui Xu,Hongchang Tao,Huake Su,Xu Liu,Lei Xie,Kang Xu,Xia An,Jincheng Zhang,Yue Hao
DOI: https://doi.org/10.1016/j.matlet.2024.136865
IF: 3
2024-06-22
Materials Letters
Abstract:As typical impurities in diamonds, the incorporated nitrogen (N) atoms could alleviate the wetting issues of GaN deposition on diamonds. Therefore, GaN was deposited on the N-incorporated diamond substrate. Through X-ray diffraction (XRD) characterization, the enhanced AlN was observed on the highly-N incorporated diamond substrate. Moreover, GaN morphology on N-incorporated diamond was greatly enhanced, showcasing superior film quality, which would be further confirmed by the Raman and photoluminescence spectra. Notably, high-resolution XRD characterization unveiled a much narrower rocking curve for GaN films on N-incorporated diamond substrates, with a full width at half maximum of 2714 arcsec, compared to 7560 arcsec on N-free diamond substrates. In conclusion, utilizing N-incorporated diamond substrates is a practical approach for GaN-on-diamond deposition.
materials science, multidisciplinary,physics, applied