H Evolution from Nano-Crystalline Silicon-Comparison of Simulation and Experiment

R. Biswas,B. C. Pan
DOI: https://doi.org/10.1557/proc-808-a2.6
2004-01-01
Abstract:The temperature dependent H evolution from a-Si:H provides unique information on the H-bonding and microstructure. Traditional undiluted a-Si:H films show a high temperature H-evolution peak near 600 °C. However device-quality compact nanocrystalline silicon films grown near the phase boundary of amorphous and microcrystalline growth show a new low temperature H- evolution peak near 400 °C in addition to a second high temperature peak near 600 °C. The origin of this peak cannot be attributed to microvoids or a substantial density of dihydride species typical of porous low-temperature films. We have simulated the H evolution using a molecular dynamics generated model of nanocrystalline silicon, where nano-crystallites reside in a background amorphous matrix. An excess density of H occurs at the crystallite surface. We find a low temperature evolution peak at 250-400 °C, where the H-evolution starts from the surface of the nano-crystallite. In addition there is a higher temperature peak at 700-800 °C providing good agreement with H-evolution measurements. The mobile H is found to exist in both the bond-centered type of species and H 2 molecules - which has implications for H-diffusion models.
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