Abstract:Accelerometer is a sensor which converts acceleration that acts on the transport input shaft to an electrical signal by a variety of means of measurements. Acceleration will change into velocity by integration, while acquire the position information by the second integration. Through measuring linear acceleration of vehicle along the certain direction by accelerometer, inertial navigation system can determine the instantaneous velocity and position of transporter relative to the reference coordinate system by necessary integration and coordinate transformation. As one of the most critical parts of platform inertial navigation system, accelerometer performance directly affects the measurement accuracy, stability of the system, and the ultimate navigation accuracy. Accelerometer is mainly affected by vibration stress during transport process. Vibration will make accelerometer's structure distort, resulting in drift of bias value and scale factor. The flexible bridge of accelerometer may break down because of the stress concentration in the instantaneous impact. Finite element analysis software ANSYS will be used for quartz accelerometer to model and simulate. Analysis of random vibration or shock vibration indicates that the quartz accelerometer can withstand the instantaneous impact for the provision of accelerometer magnitude of 180g. Meanwhile, single point response spectrum analysis under the transport vibration comes to a conclusion that accelerometer's structure will distort under the transport vibration, leading to the change of pendulum performance and torque coefficient, at last resulting in the parameter drift. The parameter drift is often caused by the releasing process of structure residual stress. The failure of accelerometer resulting from the parameter drift could be avoided by the method of stabilization of material and acceleration stabilization of the accelerometer.

Structural Failure Analysis and Numerical Simulation of Microaccelerometers under Impulsive Loading

Thermal Stress Analysis of MEMS Accelerometer Based on Finite Element Method

Finite Element Simulation on Packaging of Hinged High-G Micromachined Accelerometer

Study on Dynamic Mechanical Behavior of MEMS Based on Free Hopkinson Pressure Bar

Micro Accelerometer Reliability in Shock Environment

Sensitivity Jump of Micro Accelerometer Induced by Micro-Fabrication Defects of Micro Folded Beams

Structural Design and Testing of a Micromechanical Resonant Accelerometer

Analysis & Prevention on Pull-in Failure of Force Feedback Micro-Accelerometer after Heavy Impact

Failure mechanism analysis of quartz accelerometer under vibration condition

Study of Multi-ranged Piezoresistive Micro Accelerometer Package Failure under High Overload

Modeling and Simulation of A Silicon Integration Tri-Axial Piezoresistive MEMS Accelerometer Chip Used for High Impact Test

Design, Simulation and Fabrication of Triaxial MEMS High Shock Accelerometer

MEMS high-frequency accelerometers for mechanical fault monitoring

Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer

Design, Manufacture And Test Of Novel Mems Piezoresistive Accelerometer For High G Application

Simulation And Analysis Of Cantilever-Membrane Structure For Piezoresistive Micro-Accelerometers

Structure Design And System Simulation Of 2-D Microaccelerometer

Analysis of Thin Film Piezoelectric Microaccelerometer Using Analytical and Finite Element Modeling

Three-Beam-Seismic-Mass Structure Piezoresistive Accelerometer for High Performance Crash Test

Design and analysis of micromechanical resonant accelerometer

Dynamic characteristic measurement for MEMS microstructures in environment beyond normal