Abstract:To meet the requirements of triaxial measurement of high-shock with a high accuracy, monolithic high-performance triaxial piezoresistive accelerometers are developed for 50,000–100,000×g measure range. An axial-stressed tiny-beam scheme is developed for the X and Y axial elements that features both high sensitivity and high resonant frequency, while a three-beam twin-mass structure is developed for Z-axis element that also features aforementioned high performance. The three sensing elements are monolithically integrated by micromachining techniques of double-sided deep etching combined with piezoresistive processes. The sensor chip of the triaxial accelerometer is 4.4mm×2.3mm×1mm in dimensions. A dropping-bar system is used to characterize the accelerometer. The sensitivity in X-, Y- and Z-axes are measured as 2.17, 2.25 and 2.64μV/g/5V, respectively, while the corresponding resonant frequency is 308, 303 and 164kHz. With the dropping bar shocking system, a time-domain separation method is developed, for the first time, to realize precise test of the cross-axis sensitivity. With the novel measurement technique, satisfactory cross-axis sensitivity (not higher than 2.1%) is experimentally obtained for all the three axial elements, which contributes to the high performance of the monolithic triaxial shock accelerometers.

Micro Accelerometer Reliability in Shock Environment

The reliability of micro-accelerometer in harsh environment

Reliability of MEMS and Micromechanical Accelerometer

2 MEMS ACCELEROMETERS AND SHOCK EXPERIMENTS 2 . 1 MEMS Accelerometers

Study of Multi-ranged Piezoresistive Micro Accelerometer Package Failure under High Overload

Experimental analysis of MEMS capacitive accelerometer's shock resistibility

Shock resistance of MEMS capacitive accelerometers

Design, Simulation and Fabrication of Triaxial MEMS High Shock Accelerometer

Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer

Structural Failure Analysis and Numerical Simulation of Microaccelerometers under Impulsive Loading

Shock Reliability of Comb Accelerometer

IMPACT EXPERIMENT ANALYSIS OF MEMS ULTRA-HIGH G PIEZORESISTIVE SHOCK ACCELEROMETER

Design and experiment of high-overload capacitive micro-machined accelerometers

Study of Shock-resistibility of High-g Microaccelerometer Chip Through Impact Using Hopkinson Bar

Investigation Of Reliability Of Mems Gyroscopes Under Different Shock Conditions

High-performance Monolithic Triaxial Piezoresistive Shock Accelerometers

Package of Silicon Micromachined Shock Accelerometer and Package Performance Analysis

Reliability of MEMS in Shock Environments: 2000-2020

Investigation and experiment of high shock packaging technology for High-G MEMS accelerometer

Modeling of Mems Reliability in Shock Environments

Shock Calibration of Piezoresistive High-Gn Microaccelerometer