A Novel Impact Tester for in Situ Evaluating the Shock Reliability of Micro-Structures

Li Zhang,Fang Yang,Rui Li,Taotao Guan,Jun He,F. S. Fu,Dan Li,Dacheng Zhang
DOI: https://doi.org/10.1109/memsys.2016.7421787
2016-01-01
Abstract:This paper reported a novel impact tester which was, for the first time as far as the authors know, able to generate an in situ impact acceleration high than 120000 g to evaluate the shock reliability of microfabricated structures. And the experiment results of the novel tester show a nearly linear relationship with the results obtained from the traditional drop test, which prove it promising for a substitute. Besides, the tester was fabricated with the same process as those widely used for comb-based MEMS sensor, which made it suitable for in situ process quality monitoring and basic structure property evaluation in mass production.
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