Abstract:Strategic-grade accelerometers play a pivotal role in various application fields and fundamental research. As the performance of accelerometers are improving rapidly, the requirements for test method have been raised. However, due to the influence of environmental noise, the test facility for accelerometers, especially when the resolution reaches sub-mu g level, remains a challenge. To address this limitation, this study introduces a resolution test facility based on tilt modulation in gravity field, driven by piezoelectric ceramic stacks. The input acceleration ranges from 30ng to 10 mu g, and the frequency is adjustable from 0.01 Hz to 20 Hz. Since the input acceleration oscillates at certain frequency, modulation & demodulation technology enables us to extract ultra weak signal out of relatively noisy background. With this facility, we test the resolution of commercial strong motion accelerograph, quartz flexure accelerometers, and homemade accelerometer based on levitated optomechanics, proving the reliability of this method. Our advancement in test method lay solid foundation for strategic-grade accelerometers, not only provides a minimal resolution test solution in the ng to mu g range, but also provides a possible scheme of evaluating dynamic response characteristic with an ultra-low acceleration input in a considerable frequency range.

The reliability of micro-accelerometer in harsh environment

Micro Accelerometer Reliability in Shock Environment

Study of Multi-ranged Piezoresistive Micro Accelerometer Package Failure under High Overload

Reliability of MEMS and Micromechanical Accelerometer

Structural Failure Analysis and Numerical Simulation of Microaccelerometers under Impulsive Loading

Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer

Research Status and Development Trend of Piezoelectric Accelerometer

Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode

Design, Manufacture And Test Of Novel Mems Piezoresistive Accelerometer For High G Application

Research on the degradation mechanisms and finite element modeling of accelerometers

Sub-micro-g Resolution Test of Accelerometers Based on Tilt Dynamic Modulation in Gravity Field

Study on Package Thermal Stress of Multi-ranged Micro-accelerometer

Noise Analysis of the Triaxial Piezoelectric Micro-Accelerometer

Design, Simulation and Fabrication of Triaxial MEMS High Shock Accelerometer

Analysis & Prevention on Pull-in Failure of Force Feedback Micro-Accelerometer after Heavy Impact

Simulation Analysis and Fabrication of a Silicon Carbide-Based Piezoresistive Accelerometer

MEMS high-frequency accelerometers for mechanical fault monitoring

Design, Fabrication, and Characterization of a High-Performance Monolithic Triaxial Piezoresistive High-g Accelerometer

A High-Performance Multi-Beam Microaccelerometer for Vibration Monitoring in Intelligent Manufacturing Equipment

A Temperature-Insensitive Micromachined Resonant Accelerometer with Thermal Stress Isolation

A Micromachined Piezoresistive High-G Accelerometer With High Sensitivity And Wide Frequency-Band: Design And Modeling