Quantum Mechanical Effects On Characteristics Of Mosfet In Low Temperature Operation

Yutao Ma,Wensong Chen,Litian Liu,Lilin Tian,Zhijian Li
IF: 1.019
2000-01-01
Chinese Journal of Electronics
Abstract:Quantum Mechanical Effects (QMEs) on MOSFET inversion layer carrier density and threshold voltage were studied under different temperatures (77K similar to 400K) and different substrate doping concentration (10(16)cm(-3) similar to 10(18)cm(-3)). The studies show that QMEs will have more influences on MOSFET characteristics in low temperature. It is observed that although QMEs have a severe influence on carrier sheet density in low temperature, the excellent sub-threshold characteristics of MOSFET in low temperature remain unchanged. It is also shown that the temperature dependence of QMEs is stronger in weak inversion region than that in strong inversion region both for carrier sheet density and for threshold voltage shift.
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