The Influence of Tunneling Effect and Inversion Layer Quantization Effect on Threshold Voltage of Deep Submicron Mosfets

XY Liu,JF Kang,XD Guan,RQ Han,YY Wang
DOI: https://doi.org/10.1016/s0038-1101(00)00065-4
IF: 1.916
2000-01-01
Solid-State Electronics
Abstract:Based on the studies of the two dimensional nature of electrons in inversion layer of the ultra thin gate oxide MOSFET model to describe tunneling effect and inversion layer quantization effect on deep submicron MOSFET's threshold voltage is developed. By using of this model the influence of tunneling effect and the inversion layer quantization effect on the MOSFET threshold voltage can be estimated
What problem does this paper attempt to address?