Quantum Mechanical Effects on Deep-Submicron MOSFET Subthreshold Characteristics

MA Yutao,LIU Litian,LI Zhijian
DOI: https://doi.org/10.3321/j.issn:1000-0054.1999.z1.023
1999-01-01
Abstract:Semi classical and quantum mechanical carrier distribution models in subthreshold region were established and a new threshold voltage definition suitable for quantum mechanical theory was proposed through the solution of Schrodinger equation under triangular potential well approximation using Fermi Statistics . Carrier distribution and source drain current in subthreshold region were calculated in both semi classical and quantum mechanical theories. The quantum mechanical effects (QME) on deep submicron MOSFET subthreshold characteristics were systematically studied. The results show that in highly doped substrate case, the carrier density and subthreshold current are lowered and threshold voltage is raised considerably due to QME, but the subthreshold swing factor (S) is entirely not influenced. This work indicates that QME on deep submicron MOSFET subthreshold characteristics must be involved in modeling work and device design.
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