Analytical Charge Model for MOSFETs with 2-D Quantum Mechanical Effects

ZHANG Dawei,ZHANG Hao,Yu Zhiping,Tian Lilin
DOI: https://doi.org/10.3969/j.issn.1000-3819.2005.01.003
2005-01-01
Abstract:In sub-50-nanomet er(nm)MOSFETs,the Quantum Mechanical(QM) effects,particularly along the channel,h ave a significant influence on device ch aracteristics.Based on the WKB theory,th e QM effects in the transport direction of a MOSFET are taken into account to re vise the energy levels in the carrier co nfinement direction.This semi-analytical scheme introduces a threshold voltage s hift,which is then used to establish a f ully analytical 2-D QM charge model with the usage of p arabolic approximation to subband edge p rofiles and numerical fitting.The relati on of 2-D QM corrections to channel leng ths and other material parameters is asc ertained.Comparing to numerical 2-D QM s imulation,the correction must not be ign ored in sub-50 nm MOSFETs and the fully- analytical charge model renders satisfac tory results.
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