Electroluminescence of Si,Ge and Ar IOn-Implanted Si-Rich SiO2

Yan-bing WANG,Yong-ke SUN,Yong-ping QIAO,Bo-rui ZHANG,Guo-gang QIN,Wen-tai CHEN,Yi-yuan GONG,De-xin WU,Zhen-chang MA,Wan-hua ZONG
DOI: https://doi.org/10.3969/j.issn.1674-4926.2000.07.008
2000-01-01
Abstract:Si-rich SiO2 films are fabricated using the RF magnetron sputtering technique and a comparative study of EL from Au/Si-rich SiO2/p-Si and that from Au/ion implanted Si-rich SiO2/p-Si is made. Compared to the Au/Si-rich SiO2/p-Si whose El spectrum has a peak at 1.8 eV and a shoulder at 2.4 eV, both Au/Ge implanted Si-rich SiO2/p-Si and Au/Ar implanted Si-rich SiO2/p-Si have a new band at 2.2 eV, while Au/Si implanted Si-rich SiO2/p-Si only enhances the 1.8 eV and 2.4 eV peaks in different degrees. Some SiO2 films are also fabricated with the thermal growth technique and an investigation is carried out. But no EL can be found from the Au/thermal grown SiO2/p-Si, no matter whether the thermal grown SiO2 films are implanted or not. The results are explained by the Tunneling-Quantum Confinement-Luminescence Centers (TQCLC) model.
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