Effects of Si, Ge and Ar Ion-Implantation on EL from Au/Si-rich SiO2/p-Si Structure

Y Chen,GZ Ran,YK Sun,YB Wang,JS Fu,WT Chen,YY Gong,DX Wu,ZC Ma,WH Zong,GG Qin
DOI: https://doi.org/10.1016/s0168-583x(01)00702-9
2001-01-01
Abstract:Si-rich SiO2 films were deposited on p-Si substrates using the magnetron sputtering technique and then implanted by Si, Ge or Ar ions. Electroluminescence (EL) was observed from the semitransparent Au film/ion-implanted Si-rich SiO2/p-Si diodes with the ion-implanted Si-rich SiO2/p-Si annealed at 1050°C. In comparison with the Au/non-implanted Si-rich SiO2/p-Si diode, whose EL spectrum has a main peak at 1.8 eV and a shoulder at 2.4 eV, the Au/Si-implanted Si-rich SiO2/p-Si diode has an EL spectrum with the 1.8 and 2.4 eV peaks enhanced in intensity by factors of 2 and 8, respectively. Both EL spectra of Au/Ge-implanted Si-rich SiO2/p-Si diode Au/Ar-implanted Si-rich SiO2/p-Si diode have new strong peaks at 2.2 eV. The mechanisms for EL intensity enhancement and appearance of new EL peaks caused by ion-implantation are discussed.
What problem does this paper attempt to address?