A New Correction Model for Quantum Mechanical Effects in MOS Structure

Yutao Ma,Litian Liu,Zhijian Li
DOI: https://doi.org/10.3969/j.issn.1000-3819.2000.03.001
2000-01-01
Abstract:Based on the analysis of the inversion layer carrier distribution in the space charge region in MOS structure, the concept of surface layer effective density-of-states (SLEDOS) is proposed. Then a new charge control model suitable for both semi-classical and quantum mechanical theory is established in which the effects of inversion layer carrier distribution on surface potential are included. In this model, the effect of surface potential change after strong inversion on carrier sheet density is included and a new efficient iterative method is adopted. The model is of high efficiency and good stability. Based on the model, the effects of quantum mechanical effects (QMEs) on the strong inversion layer charge density and the surface potential are studied.
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