A New Method To Investigate Quantum Mechanical Effects In Mos Structure Strong Inversion Layer

Yutao Ma,Litian Liu,Zhijian Li
IF: 1.019
2000-01-01
Chinese Journal of Electronics
Abstract:A new method to investigate Quantum Mechanical Effects in inversion region in nMOS structure is developed. The method is under triangular potential well approximation and based on Surface Layer Effective Density-of-States (SLEDOS) approach. The method is unique in the reversed nature of the iteration procedure. It hall high efficiency and good convergence characteristics and gives satisfactorily coincident results with moire rigorous self-consistent calculation, The model developed in this work is then employed to study QMEs on inversion layer charge density and surf;ice potential. The results show that in heavily doped substrates, QMEs have a significant influence on inversion layer charge distribution and thus on the charge density and surface potential both of which are important parameters in MOSFET characteristics.
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