Abstract:System pressures are important experimental coefficients in the deposition process of thin diamond films. If proper calculation method is chosen to predict diamond growth condition quantitatively, such mehtod can guide the experimental research on the subject. Based on non-equilibrium thermodynamic coupling model, stationary project phase diagrams on diamond growth were calculated and coordinated well with quantities of experimental results that had been published. Also, phase diagrams under different pressures for C-H system were systematically drawn in this paper and the principles of the variation of diamond growth region with different pressures were obtained. The phase diagrams all have diamond domain, which is very different from the diagrams based on classical equilibrium thermodynamics. In this way, the non-equilibrium coupling model settled the controdiction between the classical equilibrium thermodynamics and the experimental fact that the diamond can grow successively and graphite can be etched under low pressure. The calculated results can give quantitatively favorable guide to experimental research on diamond growth.

The Functions of Halogen in CVD Diamond Thin Film Deposition Process

Thermodynamic Analysis for Chemical Vapor Deposition Diamond with the Participation of Chlorine

Phase Diagrams for Cvd Diamond Deposition from Halogen-Containing Gas Phase

Calculation of phase diagram for diamond growth in C-H-Cl system

Projective Phase Diagrams for CVD Diamond Growth from C–H and C–H–O Systems

Phase diagrams for activated CVD diamond growth

Utilization Of Non-Equilibrium Stationary Phase Diagrams In C-H-N Systems Diamond Deposition

Series of non-equilibrium stationary phase diagrams on diamond growth under different pressures of C-H system

Thermodynamic Analysis for Vapor-Grown Diamond

Evaluation of the Growth Condition of Chemical Vapour Deposition Diamond under Fluorine Addition

Phase diagrams for low pressure diamond synthesis in carbon-hydrogen-fluorine system

Effects of activation temperature on diamond growth in C-H, C-O and C-H-O system under low temperature

Non-Equilibrium Coupling Model For Activated Cvd Diamond Growth

Phase diagrams in C-H-N system for low pressure CVD diamond growth

Thermodynamic analysis of phase diagram for diamond growth from methane-hydrogen gas mixture

Thermodynamics of diamond film deposition at low pressure from chlorinated precursors

Phase diagram calculation of diamondgrowth from low pressure gases

A Kinetic Model for the Initial Growth of Diamond Films

C-H system low-pressure diamond growth condition influenced by activation temperature

Low Pressure Growth of Diamond Films under Fluorine Addition

Low-Temperature Growth Of Ultra-Thin Nano-Crystalline Diamond Films By Hfcvd In A Ch4/H-2 Mixture